Les communications du groupe

2017: 8

  1. [Invited] Combined scanning microwave and electron microscopy: a novel toolbox for hybrid nanoscale material analysis
    HADDADI Kamel, HAENSSLER Olaf C., DAFFE Khadim, ELIET Sophie, BOYAVAL Christophe, THERON Didier, DAMBRINE Gilles, , , , , , , ,
    IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes, IMWS-AMP 2017, Pavia, Italy, september 20-22
    (2017) to be published
  2. [Invited] Memristor device characterization by scanning microwave microscopy
    SASSINE Gilbert, NAJJARI Nabil, DEFRANCE Nicolas, HAENSSLER Olaf C., THERON Didier, ALIBART Fabien, HADDADI Kamel, , , , , , , ,
    2nd International Conference on Manipulation, Automation and Robotics at Small Scales, MARSS 2017, Montréal, Canada, july 17-21
    (2017) 281-284, ISBN 978-1-5386-0347-5 ; e-ISBN 978-1-5386-0346-8
    doi: 10.1109/MARSS.2017.8016537
  3. [Invited] Test standard for light, electron and microwave microscopy to enable robotic processes
    HAENSSLER Olaf C., KOSTOPOULOS A., DOUNDOULAKIS G., APERATHITIS E., FATIKOW S., KIRIAKIDIS G., , , , , , , , ,
    2nd International Conference on Manipulation, Automation and Robotics at Small Scales, MARSS 2017, Montréal, Canada, july 17-21
    (2017) 54-58, ISBN 978-1-5386-0347-5 ; e-ISBN 978-1-5386-0346-8
    doi: 10.1109/MARSS.2017.8001907
  4. Combining scanning microscopy and robotics: automated analysis and manipulation on the small scale
    BARTENWERFER Malte, TIEMERDING Tobias, HAENSSLER Olaf C., FATIKOW Sergej, , , , , , , , , , ,
    2nd International Conference on Manipulation, Automation and Robotics at Small Scales, MARSS 2017, Montréal, Canada, july 17-21
    (2017) 98-103, ISBN 978-1-5386-0347-5 ; e-ISBN 978-1-5386-0346-8
    doi: 10.1109/MARSS.2017.8001915
  5. Electrostatic bending actuators with a liquid filled nanometer scale gap
    GAUDET M., CONRAD H., ARSCOTT S., LANGA S., KAISER B., UHLIG S., STOLZ M., SCHENK H., , , , , , ,
    30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017, Las Vegas, NV, USA, january 22-26
    (2017) 175-178, ISBN 978-1-5090-5079-6 ; e-ISBN 978-1-5090-5078-9
    doi: 10.1109/MEMSYS.2017.7863369
  6. Nano-probing station incorporating MEMS probes for 1D device RF on-wafer characterization
    DAFFE Khadim, MARZOUK Jaouad, EL FELLAHI Abdelhatif, XU Tao, BOYAVAL Christophe, ELIET Sophie, GRANDIDIER Bruno, ARSCOTT Steve, DAMBRINE Gilles, HADDADI Kamel, , , , ,
    47th European Microwave Conference, EuMC 2017, Nuremberg, Germany, october 8-12
    (2017) paper EuMC39-2, to be published by IEEE
  7. Near-field scanning millimeter-wave microscope combined with a scanning electron microscope
    HADDADI Kamel, HAENSSLER Olaf C., BOYAVAL Christophe, THERON Didier, DAMBRINE Gilles, , , , , , , , , ,
    60th IEEE MTT-S International Microwave Symposium, IMS 2017, Honolulu, HI, USA, june 4-9
    (2017) paper TH3B-5, 1656-1659, ISBN 978-1-5090-6361-1 ; e-ISBN 978-1-5090-6360-4
    doi: 10.1109/MWSYM.2017.8058957
  8. Resolving the anomalous, giant piezoresistance controversy in nanoscale silicon objects
    LI H., LEW C.T.K., ARSCOTT S., JOHNSON B.C., McCALLUM J.C., ROWE A.C.H., , , , , , , , ,
    48th IEEE Semiconductor Interface Specialists Conference, SISC 2017, San Diego, CA, USA, december 6-9
    (2017) paper 6.11, 187-188
    http://www.ieeesisc.org/SISC2017_abstracts_book.pdf

2016: 4

  1. Gallium nitride MEMS resonators : how residual stress impacts design and performances
    MORELLE Christophe, THERON Didier, GRIMBERT Bertrand, ROCH-JEUNE Isabelle, BRANDLI Virginie, AVRAMOVIC Vanessa, OKADA Etienne, FAUCHER Marc, , , , , , ,
    18th Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2016, Budapest, Hungary, may 30-june 2
    (2016) 4 pages, e-ISBN 978-1-5090-1457-6
    doi: 10.1109/DTIP.2016.7514881
  2. Modularized SPM-controller based on an FPGA for combined AFM and SMM measurements
    WIEGHAUS Markus Franz, TIEMERDING Tobias, HAENSSLER Olaf C., FATIKOW Sergej, , , , , , , , , , ,
    1st International Conference on Manipulation, Automation and Robotics at Small Scales, MARSS 2016, Paris, France, july 18-22
    (2016) 6 pages, ISBN 978-1-5090-1511-5 ; e-ISBN 978-1-5090-1510-8
    doi: 10.1109/MARSS.2016.7561716
  3. Sensitivity and accuracy analysis in scanning microwave microscopy
    HADDADI Kamel, BRILLARD Charlene, DAMBRINE Gilles, THERON Didier, , , , , , , , , , ,
    IEEE MTT International Microwave Symposium, IMS 2016, San Francisco, CA, USA, may 22-27
    (2016) paper TH2A-4, 4 pages, e-ISBN 978-1-5090-0698-4
    doi: 10.1109/MWSYM.2016.7540188
  4. Simulation of probe misalignment effects during RF on-wafer probing
    VON KLEIST-RETZOW Fabian T., HAENSSLER Olaf C., FATIKOW Sergej, , , , , , , , , , , ,
    41st International Conference on Infrared, Millimeter and Terahertz Waves, IRMMW-THz 2016, Copenhagen, Denmark, september 25-30
    (2016) paper T5P.27.02, 2 pages, ISBN 978-1-4673-8486-5 ; e-ISBN 978-1-4673-8485-8
    doi: 10.1109/IRMMW-THz.2016.7758851

2015: 7

  1. Manipulating and characterizing with nanorobotics : in-situ SEM technique for centimeter and millimeter waves
    HAENSSLER O.C., FATIKOW S.
    40th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2015, Hong Kong, China, august 23-28
    (2015) paper TS-3, 2 pages, e-ISBN 978-1-4799-8272-1
    doi: 10.1109/IRMMW-THz.2015.7327755
  2. MEMS-based RF probes for the characterization of nano-scale electronic devices
    MARZOUK J., ARSCOTT S., EL FELLAHI A., HADDADI K., LASRI T., BUCHAILLOT L., DAMBRINE G.
    28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015, Estoril, Portugal, january 18-22
    (2015) paper M-196, 1012-1015, e-ISBN 978-1-4799-7955-4
    doi: 10.1109/MEMSYS.2015.7051133
  3. Nanorobotic RF probe station for calibrated on-wafer measurements
    EL FELLAHI A., HADDADI K., MARZOUK J., ARSCOTT S., BOYAVAL C., LASRI T., DAMBRINE G., , , , , , , ,
    45th European Microwave Conference, EuMC 2015, Paris, France, september 7-10
    (2015) 163-166, e-ISBN 978-2-87487-039-2
    doi: 10.1109/EuMC.2015.7345725
  4. On-wafer probe station for microwave metrology at the nanoscale
    EL FELLAHI A., HADDADI K., MARZOUK J., ARSCOTT S., BOYAVAL C., LASRI T., DAMBRINE G., , , , , , , ,
    IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2015, Pisa, Italy, may 11-14
    (2015) 1960-1964, e-ISBN 978-1-4799-6144-6
    doi: 10.1109/I2MTC.2015.7151582
  5. Robotic on-wafer probe station for microwave characterization in a scanning electron microscope
    HADDADI K., EL FELLAHI A., MARZOUK J., ARSCOTT S., BOYAVAL C., LASRI T., DAMBRINE G., , , , , , , ,
    63rd IEEE MTT-S International Microwave Symposium, IMS 2015, Phoenix, AZ, USA, may 17-22
    (2015) paper TH2A-3, 3 pages, e-ISBN 978-1-4799-8275-2
    doi: 10.1109/MWSYM.2015.7166970
  6. Sub-10 nm-scale capacitors and tunnel junctions measurements by SMM coupled to RF interferometry
    WANG F., DARGENT T., DUCATTEAU D., DAMBRINE G., HADDADI K., CLEMENT N., THERON D., LEGRAND B.
    45th European Microwave Conference, EuMC 2015, Paris, France, september 7-10
    (2015) 658-661, e-ISBN 978-2-87487-039-2
    doi: 10.1109/EuMC.2015.7345849
  7. When capacitive transduction meets the thermomechanical limit : towards femto-Newton force sensors at very high frequency
    HOUMADI S., LEGRAND B., SALVETAT J.P., WALTER B., MAIRIAUX E., AIME J.P., DUCATTEAU D., MERZEAU P., BUISSON P., ELEZGARAY J., THERON D., FAUCHER M.
    28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015, Estoril, Portugal, january 18-22
    (2015) 150-153, e-ISBN 978-1-4799-7955-4
    doi: 10.1109/MEMSYS.2015.7050908

2014: 8

  1. A GaN Schottky diode-based analog phase shifter MMIC
    JIN C., OKADA E., FAUCHER M., DUCATTEAU D., ZAKNOUNE M., PAVLIDIS D.
    9th European Microwave Integrated Circuits Conference, EuMIC 2014, Rome, Italy, october 6-7
    (2014) paper EuMIC06-05, 96-99, e-ISBN 978-2-87487-036-1
    doi: 10.1109/EuMIC.2014.6997800
  2. A new optimal design method for electrostatically actuated silicon-based MEMS : application to a micro-gripper with large stroke and high force resolution
    GRIRA A., ROTINAT-LIBERSA C., LEGRAND B., BUCHAILLOT L.
    1st International Conference on Engineering and Applied Sciences Optimization, OPT-i 2014, Kos Island, Greece, june 4-6
    (2014) 2407-2417, ISBN 978-960999946-5
  3. AlGaN/GaN high electron mobility transistors with downscaled buffer : toward NEMS applications
    LECLAIRE P., FAUCHER M., CHENOT S., THERON D., CORDIER Y.
    41st International Symposium on Compound Semiconductor, ISCS 2014, Compound Semiconductor Week, CSW 2014, Montpellier, France, may 11-15
    (2014) paper Th-A2-5, USB drive, 2 pages
  4. Interferometric near-field microwave microscopy platform for electromagnetic micro-analysis
    HADDADI K., MARZOUK J., GU S., ARSCOTT S., DAMBRINE G., LASRI T., , , , , , , , ,
    28th Eurosensors Conference, EUROSENSORS 2014, Brescia, Italy, september 7-10
    Procedia Engineering, 87 (2014) 388-391
    doi: 10.1016/j.proeng.2014.11.733
  5. Miniaturized MEMS-based GSG probes for microwave characterization
    MARZOUK J., ARSCOTT S., HADDADI K., LASRI T., DAMBRINE G.
    44th European Microwave Conference, EuMC 2014, Rome, Italy, october 6-9
    (2014) paper EuMC Poster01-17, 1150-1153, e-ISBN 978-2-87487-035-4
    doi: 10.1109/EuMC.2014.6986644
  6. Miniaturized microcantilever-based RF microwave probes using MEMS technologies
    MARZOUK J., ARSCOTT S., HADDADI K., LASRI T., BOYAVAL C., LEPILLIET S., DAMBRINE G.
    28th Eurosensors Conference, EUROSENSORS 2014, Brescia, Italy, september 7-10
    Procedia Engineering, 87 (2014) 692-695
    doi: 10.1016/j.proeng.2014.11.631
  7. Room temperature THz heterodyne detector based on GaN unipolar nanochannels
    DAHER C., INIGUEZ-DE-LA-TORRE I., TORRES J., NOUVEL P., VARANI L., SANGARE P., GRIMBERT B., FAUCHER M., DUCOURNAU G., GAQUIERE C., MATEOS J., GONZALES T.
    41st International Symposium on Compound Semiconductor, ISCS 2014, Compound Semiconductor Week, CSW 2014, Montpellier, France, may 11-15
    (2014) paper P43, USB drive, 2 pages
  8. Zero-bias GaN implanted self-switching diode coupled with bow-tie antenna for THz applications
    SANGARE P., DUCOURNAU G., GRIMBERT B., FAUCHER M., GAQUIERE C.
    44th European Microwave Conference, EuMC 2014, Rome, Italy, october 6-9
    (2014) paper EuMC42-02, 806-809, e-ISBN 978-2-87487-035-4
    doi: 10.1109/EuMC.2014.6986557

Invited: 2

  1. Near-field microscopy : is there an alternative to micro and nano resonating cantilevers ?
    BUCHAILLOT L., MAIRIAUX E., WALTER B., XIONG Z., FAUCHER M., LEGRAND B., THERON D., ALGRE E.
    IEEE International Frequency Control Symposium, IFCS 2014, Taipei, Taiwan, may 19-22, 2014, paper 2160, 2 pages
    doi: 10.1109/FCS.2014.6859928
  2. Ultimate ring resonator for atomic force microscopy : a possible way for biosensing
    BUCHAILLOT L.
    4th International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2014, Taipei, Taiwan, october 27-31, 2014

2013: 4

  1. 5.4 MHz dog-bone oscillating AFM probe with thermal actuation and piezoresistive detection
    XIONG Z., MAIRIAUX E., WALTER B., FAUCHER M., BUCHAILLOT L., LEGRAND B.
    26th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2013, Taipei, Taiwan, january 20-24
    (2013) 592-595, ISBN 978-1-4673-5654-1
    doi: 10.1109/MEMSYS.2013.6474311
  2. A 1 GHz SAW oscillator on epitaxial GaN/Si substrate : toward co-integrated frequency sources
    FAUCHER M., MARTIN G., FRIEDT J.M., BALLANDRAS S.
    6th Joint IEEE International Frequency Control Symposium/European Frequency and Time Forum, IFCS-EFTF 2013, Prague, Czech Republic, july 21-25
    (2013) paper IFCS-EFTF1-B2-5, 21-24, ISBN 978-1-4799-0342-9
    doi: 10.1109/EFTF-IFC.2013.6702231
  3. AlGaN/GaN heterostructures with very-thin buffer on Si (111) for NEMS applications : electrical and mechanical study
    LECLAIRE P., CORDIER Y., CHENOT S., THERON D., FAUCHER M.
    22nd European Workshop on Heterostructure Technology, HeTech 2013, Glasgow, Scotland, UK, september 9-11
    (2013) 2 pages
  4. Microwave reflectometry : a high-resolution technique for measuring vibration of capacitive microresonators
    LEGRAND B., DUCATTEAU D., THERON D., WALTER B., TANBAKUCHI H.
    17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013, Barcelona, Spain, june 16-20
    (2013) 566-569, ISBN 978-1-4673-5981-8, IEEE Catalog Number : CFP13SSA-USB
    doi: 10.1109/Transducers.2013.6626829

Invited: 3

  1. A room temperature THz heterodyne detector based on self-switching nanodiodes
    TORRES J., NOUVEL P., PENOT A., VARANI L., SANGARE P., GRIMBERT B., FAUCHER M., DUCOURNAU G., GAQUIERE C., INIGUEZ-DE-LA-TORRE I., MATEOS J., GONZALEZ T.
    18th International Conference on Electron Dynamics in Semiconductors, Optoelectronics and Nanostructures, EDISON18, Matsue, Japan, july 22-26, 2013, paper Mo2-1
  2. Selenium surface energy determination from size dependent considerations
    GUISBIERS G., ARSCOTT S., GAUDET M., BELFIORE A., SNYDERS R.
    5th IEEE International Nanoelectronics Conference, IEEE INEC 2013, Sentosa Island, Singapore, january 2-4, 2013, 105-109, ISBN 978-1-4673-4840-9
    doi: 10.1109/INEC.2013.6465968
  3. Silicon MEMS resonators : a story from signal processing devices to atomic force microscopy sensors
    LEGRAND B., FAUCHER M., BUCHAILLOT L., MAIRIAUX E., WALTER B., XIONG Z., , , , , , , , ,
    6th Joint IEEE International Frequency Control Symposium and European Frequency and Time Forum, IFCS-EFTF 2013, Prague, Czech Republic, july 21-25, 2013, paper IFCS-EFTF4-C2-1

2012: 3

  1. Conception and fabrication of piezo-resistive ring shaped AFM probe
    XIONG Z., WALTER B., MAIRIAUX E., FAUCHER M., BUCHAILLOT L., LEGRAND B.
    25th IEEE Conference on Micro Electro Mechanical Systems, MEMS 2012, Paris, France, january 29-february 2
    (2012) 547-550, ISBN 978-1-4673-0324-8
    doi: 10.1109/MEMSYS.2012.6170180
  2. DNA origami imaging with 10.9 MHz AFM MEMS probes
    WALTER B., MAIRIAUX E., XIONG Z., FAUCHER M., BUCHAILLOT L., LEGRAND B.
    25th IEEE Conference on Micro Electro Mechanical Systems, MEMS 2012, Paris, France, january 29-february 2
    (2012) 555-558, ISBN 978-1-4673-0324-8
    doi: 10.1109/MEMSYS.2012.6170236
  3. Piezo-resistive ring-shaped AFM sensors with piconewton force resolution
    XIONG Z., WALTER B., MAIRIAUX E., FAUCHER M., BUCHAILLOT L., LEGRAND B.
    2nd International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2012, Xi'an, China, august 29-september 1
    (2012) paper ID 1200991, 184-189, ISBN 978-1-4673-4588-0
    doi: 10.1109/3M-NANO.2012.6472963

Invited: 3

  1. GaN MEMS resonators : from demonstration to microsystem-compatible performances
    FAUCHER M., BEN AMAR A., ZHANG V., CORDIER Y., WERQUIN M., BRANDLI V., GRIMBERT B., VAURETTE F., TILMANT P., FRANÇOIS M., BOYAVAL C., LEPILLIET S., DUCATTEAU D., GAQUIERE C., BUCHAILLOT L., THERON D.
    36th Workshop on Compound Semiconductor Devices and Integrated Circuits, WOCSDICE 2012, Porquerolles, France, may 28-30, 2012, 1-4
  2. GaN resonant MEMS
    FAUCHER M., BRANDLI V., GRIMBERT B., FRANCOIS M., TILMANT P., BEN-AMAR A., BUCHAILLOT L., GAQUIERE C., THERON D., CORDIER Y., SEMOND F.
    4th International Conference on Smart Materials, Structures & Systems, CIMTEC 2012, Symposium E - Next Generation Micro/Nano Systems, Montecatini Terme, Italy, june 10-14, 2012, paper E-1:IL02
  3. GaN-based nano rectifiers for THz detection
    SANGARE P., DUCOURNAU G., GRIMBERT B., BRANDLI V., FAUCHER M., GAQUIERE C.
    37th International Conference on Infrared, Millimeter and THz Waves, IRMMW-THz 2012, Wollongong, Australia, september 23-28, 2012, 1-2, ISBN 978-1-4673-1598-2
    doi: 10.1109/IRMMW-THz.2012.6380340

2011: 5

  1. 4.8 MHz AFM nanoprobes with capacitive transducers and batch-fabricated nanotips
    WALTER B., FAUCHER M., MAIRIAUX E., XIONG Z., BUCHAILLOT L., LEGRAND B.
    24th International Conference on Micro Electro Mechanical Systems, MEMS 2011, Cancun, Mexico, january 23-27
    (2011) 517-520, ISBN 978-1-4244-9632-7
    doi: 10.1109/MEMSYS.2011.5734475
  2. Characterization and modeling for the piezoelectric actuator of AlGaN/GaN-resonators
    BEN AMAR A., FAUCHER M., GRIMBERT B., BRANDLI V., BUCHAILLOT L., GAQUIERE C., THERON D.
    20th European Workshop on Heterostructure Technology, HeTech 2011, Villeneuve d'Ascq, France, november 7-9
    (2011) 1-2
  3. Conception and fabrication of silicon ring resonator with piezo-resistive detection for force sensing applications
    XIONG Z., WALTER B., MAIRIAUX E., FAUCHER M., BUCHAILLOT L., LEGRAND B.
    ASME 2011 International Mechanical Engineering Congress & Exposition, IMECE 2011, Denver, CO, USA, november 11-17
    (2011) IMECE2011-65083-1-5
    ftp://202.38.89.18/incoming/ASME/data/pdfs/trk-5/IMECE2011-65083.pdf
  4. Gallium nitride approach for MEMS resonators with highly tunable piezo-amplified transducers
    FAUCHER M., CORDIER Y., SEMOND F., BRANDLI V., GRIMBERT B., BEN AMAR A., WERQUIN M., BOYAVAL C., GAQUIERE C., THERON D., BUCHAILLOT L.
    24th International Conference on Micro Electro Mechanical Systems, MEMS 2011, Cancun, Mexico, january 23-27
    (2011) 581-584, ISBN 978-1-4244-9632-7
    doi: 10.1109/MEMSYS.2011.5734491
  5. Optimal design of non intuitive compliant microgripper with high resolution
    GRIRA A., LEGRAND B., ROTINAT-LIBERSA C., MAIRIAUX E., BUCHAILLOT L.
    IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 2011, San Francisco, CA, USA, september 25-30
    (2011) 45-50, ISBN 978-1-61284-454-1
    doi: 10.1109/IROS.2011.6048665

Invited: 3

  1. 12 years of resonator : from telephone to atomic force microscopy
    BUCHAILLOT L., LEGRAND B., FAUCHER M., WALTER B., ALGRE E., XIONG Z.
    22nd International Symposium on Micro-NanoMechatronics and Human Science, MHS 2011, Nagoya, Japan, november 6-9, 2011, 2-2, ISBN 978-1-4577-1360-6
    doi: 10.1109/MHS.2011.6102145
  2. GaN : a multifunctional material enabling MEMS resonators based on amplified piezoelectric detection
    FAUCHER M., BEN AMAR A., GRIMBERT B., BRANDLI V., BUCHAILLOT L., GAQUIERE C., THERON D., CORDIER Y., SEMOND F., WERQUIN M.
    Proceedings of 2011 Joint Conference of the IEEE International Frequency Control Symposium and the European Frequency and Time Forum, IFCS/EFTF 2011, San Francisco, CA, USA, may 1-5, 2011, 1-5, ISBN 978-1-61284-111-3
    doi: 10.1109/FCS.2011.5977761
  3. Wide bandgap self switch nanodevices for THz applications at room temperature
    GAQUIERE C., DUCOURNAU G., SANGARE P., GRIMBERT B., FAUCHER M., INIGUEZ-DE-LA-TORRE I., INIGUEZ-DE-LA-TORRE A., GONZALEZ T., MATEOS J.
    41st European Microwave Conference, EuMC 2011, Manchester, UK, october 10-13, 2011, 1150-1152, ISBN 978-1-61284-235-6
    http://ieeexplore.ieee.org/search/searchresult.jsp?arnumber=6102016

2010: 5

  1. GaAs spin injector microcantilever probe assembly via a releasable 'epiaxial patch technology'
    ARSCOTT S., PEYTAVIT E., VU D., ROWE A., PAGET D.
    Eurosensors XXIV, Linz, Austria, september 5-8
    Procedia Engineering, 5 (2010) 1039-1042
    doi: 10.1016/j.proeng.2010.09.287
  2. Micropatterned SU-8 surfaces for automatic droplet focusing and single-cell immobilization
    DEBUISSON D., ARSCOTT S., SENEZ V.
    20th Anniversary World Congress on Biosensors, Biosensors 2010, Glasgow, Scotland, UK, may 26-28
    (2010) paper P3.3.018, 1-2
  3. Surface microscopy with laserless MEMS based AFM probes
    ALGRE E., LEGRAND B., FAUCHER M., WALTER B., BUCHAILLOT L.
    23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010, Hong Kong SAR, China, january 24-28
    (2010) 292-295, ISBN 978-1-4244-5761-8
    doi: 10.1109/MEMSYS.2010.5442509
  4. Mechanical characterization of aluminium nanofilms
    GUISBIERS G., HERTH E., BUCHAILLOT L., , , , , , , , , , , ,
    19th International Workshop on Materials for Advanced Metallization, MAM 2010, Mechelen, Belgium, march 7-10
    Microelectron. Eng., 88, 5 (2011) 844-847
    doi: 10.1016/j.mee.2010.06.028
  5. Optimization of ohmic contact and adhesion on polysilicon in MEMS-NEMS wet etching process
    HERTH E., ALGRÉ E., LEGRAND B., BUCHAILLOT L., , , , , , , , , , ,
    19th International Workshop on Materials for Advanced Metallization, MAM 2010, Mechelen, Belgium, march 7-10
    Microelectron. Eng., 88, 5 (2011) 724-728
    doi: 10.1016/j.mee.2010.06.032

Invited: 1

  1. MEMS advances and GaN based approaches
    FAUCHER M., BRANDLI V., GRIMBERT B., BEN AMAR A., WERQUIN M., GAQUIERE C., THERON D., BUCHAILLOT L.
    34th Workshop on Compound Semiconductor Devices and Integrated Circuits in Europe, WOCSDICE 2010, Darmstadt, Germany, may 17-19, 2010

2009: 7

  1. Electrode sizing for guided wave resonator above a Bragg mirror
    KONE I., REINHARDT A., DOMINGUE F., DUBUS B., BUCHAILLOT L., CASSET F., CARPENTIER J.F., AID M., , , , , , ,
    63rd IEEE International Frequency Control Symposium, joint with 23rd European Frequency and Time Forum, EFTF-IFCS 2009, Besançon, France, april 20-24
    (2009) 904-907, ISBN 978-1-4244-3511-1
    doi: 10.1109/FREQ.2009.5168318
  2. Fuel supply optimization in micro fuel cells
    KAMITANI A., MORISHITA S., KOTAKI H., ARSCOTT S.
    Eurosensors XXIII, Lausanne, Switzerland, september 6-9
    Procedia Chem., 1, 1 (2009) 457-460
    doi: 10.1016/j.proche.2009.07.114
  3. High-Q and low-RM 24-MHz radial-contour mode disk resonators fabricated with silicon passive integration technology
    SWOROWSKI M., NEUILLY F., LEGRAND B., SUMMANWAR A., LALLEMAND F., PHILIPPE P., BUCHAILLOT L.
    15th International Conference on Solid State Sensors, Actuators and Microsystems, Transducers 2009, Denver, CO, USA, june 21-25
    (2009) 2114-2117, ISBN 978-1-4244-4190-7
    doi: 10.1109/SENSOR.2009.5285623
  4. Low actuation voltage SPDT RF MEMS K band switch using a single gold membrane
    ROBIN R., MILLET O., SEGUENI K., BUCHAILLOT L.
    22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009, Sorrento, Italy, january 25-29
    (2009) 872-875, ISBN 978-1-4244-2977-6
    doi: 10.1109/MEMSYS.2009.4805522
  5. Thermoelastic FEM-BEM model for MEMS resonator simulation
    EKEOM D., BUCHAILLOT L.
    22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009, Sorrento, Italy, january 25-29
    (2009) 923-926, ISBN 978-1-4244-2977-6
    doi: 10.1109/MEMSYS.2009.4805535
  6. Tip-matter interaction measurements using MEMS ring resonators
    ALGRE E., LEGRAND B., FAUCHER M., WALTER B., BUCHAILLOT L.
    15th International Conference on Solid State Sensors, Actuators and Microsystems, Transducers 2009, Denver, CO, USA, june 21-25
    (2009) 1638-1641, ISBN 978-1-4244-4190-7
    doi: 10.1109/SENSOR.2009.5285774
  7. Microfabricated microfluidic fuel cells
    KAMITANI A., MORISHITA S., KOTAKI H., ARSCOTT S., , , , , , , , , , ,
    Eurosensors XXIII, Lausanne, Switzerland, september 6-9
    Sens. Actuator B-Chem., 154, 2 (2011) 174-180
    doi: 10.1016/j.snb.2009.11.014

2008: 6

  1. A new four states high deflection low actuation voltage electrostatic MEMS switch for RF applications
    ROBIN R., TOUATI S., SEGUENI K., MILLET O., BUCHAILLOT L.
    Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2008, Nice, Fance, april 9-11
    (2008) 56-59, ISBN 978-2-35500-006-5
    doi: 10.1109/DTIP.2008.4752952
  2. Characterization of in-IC integrable in-plane nanometer scale resonators fabricated by a silicon on nothing advanced CMOS technology
    DURAND C., CASSET F., LEGRAND B., FAUCHER M., RENAUX P., MERCIER D., RENAUD D., DUTARTRE D., OLLIER E., ANCEY P., BUCHAILLOT L., , , ,
    21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008, Tucson, AZ, USA, january 13-17
    (2008) 1016-1019, ISBN: 978-1-4244-1793-3
    doi: 10.1109/MEMSYS.2008.4443831
  3. Low actuation voltage totally free flexible RF MEMS switch with antistiction system
    TOUATI S., LORPHELIN N., KANCIURZEWSKI A., ROBIN R., ROLLIER A.S., MILLET O., SEGUENI K.
    Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2008, Nice, France, april 9-11
    (2008) 66-70, ISBN 978-2-35500-006-5
    doi: 10.1109/DTIP.2008.4752954
  4. Resonator using guided waves in a piezoelectric layer above a Bragg mirror
    KONE I., DUBUS B., BUCHAILLOT L., REINHARDT A., CASSET F., AID M., CARPENTIER J.F., ANCEY P., , , , , , ,
    IEEE International Frequency Control Symposium, Honolulu, HI, USA, may 19-21
    (2008) 581-585, ISBN 978-1-4244-1794-0
    doi: 10.1109/FREQ.2008.4623066
  5. Simulation and optimization of a totally free flexible RF MEMS switch
    LORPHELIN N., ROBIN R., ROLLIER A.S., TOUATI S., KANCIURZEWSKI A., MILLET O., SEGUENI K., , , , , , , ,
    19th MicroMechanics Europe Workshop, MME 2008, Aachen, Germany, september 28-30
    J. Micromech. Microeng., 19, 7 (2009) 074017-1-9
    doi: 10.1088/0960-1317/19/7/074017
  6. Ultra-sensitive capacitive detection based on SGMOSFET compatible with front-end CMOS process
    COLINET E., DURAND C., DURAFFOURG L., AUDEBERT P., DUMAS G., CASSET F., OLLIER E., ANCEY P., CARPENTIER J.F., BUCHAILLOT L., IONESCU A.M., , , ,
    IEEE International Solid-State Circuits Conference, ISSCC 2008, San Francisco, CA, USA, february 3-7
    IEEE J. Solid-State Circuits, 44, 1 (2009) 247-257
    doi: 10.1109/JSSC.2008.2007448

2007: 10

  1. A design for 24GHz SPDT using a single RF MEMS switch based on a totally free flexible membrane
    ROBIN R., LE GARREC L., SEGUENI K., MILLET O., BUCHAILLOT L.
    8th International Symposium on RF MEMS and RF Microsystems, MEMSWAVE 2007, Barcelona, Spain, june 26-27
    (2007) 133-136
  2. A totally free flexible membrane : a design for low electrostatic actuation MEMS
    SEGUENI K., ROLLIER A.S., LE GARREC L., ROBIN R., TOUATI S., KANCIURZEWSKI A., BUCHAILLOT L., MILLET O.
    14th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers'07, Lyon, France, june 10-14
    (2007) 461-464
    doi: 10.1109/SENSOR.2007.4300167
  3. Compact multilayer piezoresistive gauge for in-plane strain measurement in liquids
    BUREAU J.B., LEGRAND B., COLLARD D., BUCHAILLOT L.
    14th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers'07, Lyon, France, june 10-14
    (2007) 2267-2270
    doi: 10.1109/SENSOR.2007.4300621
  4. High yield grafting of carbon nanotube on ultra-sharp silicon nanotips : mechanical characterization and AFM imaging
    ROLLIER A.S., BERNARD C., MARSAUDON S., BONNOT A.M., FAUCHER M., AIMÉ J.P., LEGRAND B., COLLARD D., BUCHAILLOT L.
    20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007, Kobe, Japan, january 21-25
    (2007) 851-854
    doi: 10.1109/MEMSYS.2007.4433179
  5. Proposition of atomic force probes based on silicon ring-resonators
    FAUCHER M., WALTER B., ROLLIER A.S., SEGUENI K., LEGRAND B., COUTURIER G., AIMÉ J.P., BERNARD C., BOISGARD R., BUCHAILLOT L.
    14th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers'07, Lyon, France, june 10-14
    (2007) 1529-1532
    doi: 10.1109/SENSOR.2007.4300436
  6. Silicon nano-ESI emitters for mass spectrometry : a mixed micromechanical and microfluidic design
    LEGRAND B., BUCHAILLOT L., ASHCROFT A.E., ARSCOTT S.
    14th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers'07, Lyon, France, june 10-14
    (2007) 791-794
    doi: 10.1109/SENSOR.2007.4300249
  7. Silicon-based biomimetic flying insect
    SOYER C., GRONDEL S., HLADKY-HENNION A.C., DARGENT T., CATTAN E., DANET B., RAKOTOMAMONJY T., VASIC D., POULIN G., MARCHAND N., RIFAI H.
    International Symposium on Flying Insects and Robots, FIR 2007, Monte Verità, Ascona, Switzerland, august 12-17
    (2007) 111-112
    http://fir.epfl.ch/docs/FIR_proceedings_online.pdf
  8. Totally free-flexible membrane for low voltage MEMS metal contact switch
    SEGUENI K., LE GARREC L., ROLLIER A.S., ROBIN R., TOUATI S., KANCIURZEWSK A., BUCHAILLOT L., MILLET O.
    37th European Microwave Conference, EuMC 2007, Munich, Germany, october 9-12
    (2007) 1153-1156
    doi: 10.1109/EUMC.2007.4405403
  9. Tuning beam electromechanical resonators
    CASSET F., DURAND C., ANCEY P., AID M., BUCHAILLOT L., , , , , , , , , ,
    8th International Symposium on RF MEMS and RF Microsystems, MEMSWAVE 2007, Barcelona, Spain, june 26-27
    (2007)
  10. Silicon on nothing MEMS electromechanical resonator
    DURAND C., CASSET F., ANCEY P., JUDONG F., TALBOT A., QUENOUILLERE R., RENAUD D., BOREL S., FLORIN B., BUCHAILLOT L., , , , ,
    Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2007, Stresa, Italy, april 25-27
    Microsyst. Technol., 14, 7 (2008) 1027-1033
    doi: 10.1007/s00542-007-0485-z

2006: 14

  1. Design, fabrication and characterization of high frequency piezoelectric micromachined ultrasonic transducers
    DUVAL F., HLADKY-HENNION A.C., CATTAN E., ZHANG Q., DOREY R.
    IEEE International Ultrasonics Symposium, Vancouver, Canada, october 3-6
    (2006) 1959-1962
    doi: 10.1109/ULTSYM.2006.495
  2. Dielectrophoresis, cell culture, and electrical impedance spectroscopy applied to adherent cells in a single biochip
    LENNON E., OSTROVIDOV S., SENEZ V., FUJII T.
    IEEE-EMBS International Conference on Microtechnologies in Medicine and Biology, MMB 2006, Bankoku-Shinryokan, Okinawa, Japan, may 9-12
    (2006) 165-168
    doi: 10.1109/MMB.2006.251518
  3. Electrostatic actuators operating in liquid environment: suppression of pull-in instability and dynamic response
    ROLLIER A.S., FAUCHER M., LEGRAND B., COLLARD D., BUCHAILLOT L.
    Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2006, Stresa, Lago Maggiore, Italy, april 26-28
    (2006) 244-249
    http://hdl.handle.net/2042/6481
  4. Micro-machined actuators for the friction driven micro-motor
    LEGRAND B., BUCHAILLOT L., COLLARD D.
    10th International Conference on New Actuators, ACTUATOR 2006, Bremen, Germany, june 14-16
    (2006) 211-214
  5. Microfluidic devices for ultra wide band electromagnetic spectroscopy of single cell
    AKALIN T., ARSCOTT S., BOCQUET B., BOURZGUI N.E., SENEZ V., TREIZEBRÉ A., FUJII T., LENNON E., SAKAI Y., YAMAMOTO T.
    IEEE-EMBS International Conference on Microtechnologies in Medicine and Biology, MMB 2006, Bankoku-Shinryokan, Okinawa, Japan, may 9-12
    , 1 (2006) 252-255
    doi: 10.1109/MMB.2006.251542
  6. Millimeter wave planar antennas printed on micromachined ultra-soft PDMS substrate
    TIERCELIN N., COQUET P., SAULEAU R., SENEZ V., FUJITA H.
    4th ESA Workshop on Millimetre Wave Technology and Applications : circuits, systems, and measurements techniques, MilliLab, Espoo, Finland, february 15-17
    , 1 (2006) 331-336
  7. Parallel-plate electrostatic actuators in liquids : displacement-voltage optimisation for microfluidic applications
    LEGRAND B., ROLLIER A.S., BUCHAILLOT L., COLLARD D.
    19th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2006, Istanbul, Turkey, january 22-26
    (2006) 718-721
    doi: 10.1109/MEMSYS.2006.1627900
  8. Periodic transmission lines for terahertz BioMEMS
    AKALIN T., DARGENT T.
    Photonics Europe : Photonic Crystal Materials and Devices III, Strasbourg, France, april 3-7
    Proc. SPIE-Int. soc. opt. eng., 6182 (2006) 61822L-1-9
    doi: 10.1117/12.663010
  9. Remote actuation of independant electrostatic distributed micromechanical systems (DMMS) for a wireless microrobot
    BASSET P., BUCHAILLOT L., COLLARD D., KAISER A.
    32nd Annual Conference of the IEEE Industrial Electronics Society, IEEE IECON'06, Paris, France, november 7-10
    (2006) 3078-3083
    doi: 10.1109/IECON.2006.347739
  10. Silicon nanotweezers with adjustable and controlable gap for the manipulation and characterization of DNA molecules
    YAMAHATA C., TAKEKAWA T., AYANO K., HOSOGI M., KUMEMURA M., LEGRAND B., COLLARD D., HASHIGUCHI G., FUJITA H.
    IEEE-EMBS International Conference on Microtechnologies in Medicine and Biology, MMB 2006, Bankoku-Shinryokan, Okinawa, Japan, may 9-12
    (2006) 123-126
    doi: 10.1109/MMB.2006.251507
  11. Top-down approaches for the study of single-cells: micro-engineering and electrical phenotype
    SENEZ V., AKALIN T., ARSCOTT S., BOURZGUI N.E., BOCQUET B., FUJI T., LENNON E., YAMAMOTO T.
    Biomedical Applications of Nano Technologies Conference, Sicily, Italy, june 4-9
    (2006) 105-114
    http://www.ttp.net/3-908158-09-5/2.html
  12. Ultra wide band dielectric spectroscopy of single cell in microfluidic devices
    SENEZ V., TREIZEBRÉ A., LENNON E., GHANDOUR H., MILLE V., HEIM T., AKALIN T., YAMAMOTO T., BOURZGUI N., LEGRAND D., SAKAI Y., SUPIOT P., MAZURIER J., FUJII T., BOCQUET B.
    10th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS2006, Tokyo, Japan, november 5-9
    , 1 (2006) 738-740
  13. Ultra-low voltage MEMS resonator based on RSG-MOSFET
    ABELE N., SEGUENI K., BOUCART K., CASSET F., LEGRAND B., BUCHAILLOT L., ANCEY P., IONESCU A.M., , , , , , ,
    19th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2006, Istanbul, Turkey, january 22-26
    (2006) 882-885
    doi: 10.1109/MEMSYS.2006.1627941
  14. Sub-attolitre nanodroplet deposition using a silicon-based nanoelectrospray emitter tip
    DESCATOIRE C., BUCHAILLOT L., ARSCOTT S.
    European Materials Research Society Spring Meeting, Symposium A on Current Trends in Nanoscience - from Materials to Applications, Nice, France, may 29-june 2
    Mater. Sci. Eng. C-Biomet. Supramol. Syst., 27, 5-8 (2007) 1491-1495
    doi: 10.1016/j.msec.2006.09.009

Invited: 2

  1. Damaging process determination
    BUCHAILLOT L., MILLET O.
    Symposium on Mechanical Reliability of Silicon MEMS – Recent progress and further requirements, Halle Saale, Germany, february 27-28, 2006
  2. Dielectric spectroscopy of single cell
    SENEZ V.
    11th International Ceramics Congress/International Conferences on Materials and Technologies, CIMTEC 2006, Acireale, Sicily, Italy, june 4-9, 2006

2005: 24

  1. 1.1 GHz silicon blade nano-electromechanical resonator featuring 20 nm gap lateral transducers
    AGACHE V., LEGRAND B., COLLARD D., FUJITA H., BUCHAILLOT L., , , , , , , , , ,
    18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005, Miami Beach, FL, USA, january 30-february 3
    (2005) 121-124
    doi: 10.1109/MEMSYS.2005.1453882
  2. 3D self-assembling of SU-8 microstructures on silicon by plasma induced compressive stress
    BUREAU J.B., LEGRAND B., COLLARD D., BUCHAILLOT L.
    13th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS'05, Seoul, South Korea, june 5-9
    , 1 (2005) 1/19-22
    doi: 10.1109/SENSOR.2005.1496348
  3. A nanofluidic electrospray source fabricated using focused ion beam etching
    DESCATOIRE C., TROADEC D., ASHCROFT A., BUCHAILLOT L., ARSCOTT S.
    9th International Conference on Miniaturized Systems for Chemistry and Life Sciences, µTAS 2005, Boston, MA, USA, october 9-13
    , 1 (2005) 241-244
  4. Biaxial initial stress characterization of bilayer gold RF-switches
    YACINE K., FLOURENS F., BOURRIER D., SALVAGNAC L., CALMONT P., LAFONTAN X., DUONG Q.H., BUCHAILLOT L., PEYROU D., PONS P., PLANA R.
    16th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis, Arcachon, France, october 10-14
    Microelectron. Reliab., 45, 9-11 (2005) 1776-1781
    doi: 10.1016/j.microrel.2005.07.093
  5. Bulk microswitch for power RF applications
    MULLER P., ROLLAND N., ZIAEI A., POLIZZI J.P., COLLARD D., BUCHAILLOT L.
    18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005, Miami Beach, FL, USA, january 30-february 3
    (2005) 171-174
    doi: 10.1109/MEMSYS.2005.1453894
  6. Characterization of vertical vibration of electrostatically actuated resonators using Atomic Force Microscope in noncontact mode
    AGACHE V., LEGRAND B., NAKAMURA K., KAWAKATSU H., BUCHAILLOT L., TOSHIYOSHI H., COLLARD D., FUJITA H.
    13th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS'05, Seoul, South Korea, june 5-9
    , 2 (2005) 2/2023-2026
    doi: 10.1109/SENSOR.2005.1497499
  7. Close infrared thermography using an intensified CCD camera : application in nondestructive high resolution evaluation of electrothermally actuated MEMS
    SERIO B., HUNSINGER J.J., CONSEIL F., DERDERIAN P., COLLARD D., BUCHAILLOT L., RAVAT M.F.
    Optical Measurement Systems for Industrial Inspection IV, Munich, Germany, june 13
    Proc. SPIE-Int. soc. opt. eng., 5856, 1 (2005) 819-829
    doi: 10.1117/12.612261
  8. Compensation by design of thermal dilatation in RF MEMS switches
    DUONG Q.H., LAFONTAN X., COLLARD D., BUCHAILLOT L., SCHMITT P., PONS P., FLOURENS F., PRESSECQ F.
    Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2005, Montreux, Switzerland, june 1-3
    (2005) 190-194
  9. Electrostatic actuators operating in liquid environment : position control without pull-in effect
    ROLLIER A.S., LEGRAND B., COLLARD D., BUCHAILLOT L.
    Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2005, Montreux, Switzerland, june 1-3
    (2005) 341-346
  10. Evaluation of electric impedance spectra for single bio-cells in microfluidic devices using combined FEMLAB/ELDO modeling
    SENEZ V., ARSCOTT S.
    FEMLAB 2005 Conference, COMSOL Multiphysics, Paris, France, november 15
    , 1 (2005) 472-475
  11. Integration of three dimensional microelectrodes in microfluidic biochip for electric field based processing of biological species : application to electrical impedance spectroscopy
    LENNON E., SENEZ V., YAMAMOTO T., FUJITA H., FUJII T.
    13th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS'05, Seoul, South Korea, june 5-9
    , 2 (2005) 2/1724-1727
    doi: 10.1109/SENSOR.2005.1497424
  12. MEMS reliability : metrology set-up for investigation of fatigue causes
    MILLET O., BLANRUE O., LEGRAND B., COLLARD D., BUCHAILLOT L.
    18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005, Miami Beach, FL, USA, january 30-february 3
    (2005) 483-486
    doi: 10.1109/MEMSYS.2005.1453972
  13. Micromachined actuators for friction driven linear micro-motors
    LEGRAND B., BUCHAILLOT L., COLLARD D.
    Fifth International Symposium on Linear Drive for Industry Applications, LDIA 2005, Hyogo, Japan, september 25-28
    (2005) 25-28
  14. Monitoring capillary endothelial cell culture and capillary formation in a microdevice by impedance spectroscopy measurements
    RISSANEN K., OSTROVIDOV S., LENNON E., SENEZ V., KIM J., KIM B., FURUKAWA K.S., USHIDA T., SAKAI Y., FUJII T.
    3rd IEEE-EMBS Conference on Microtechnologies in Medicine and Biology, Oahu, HI, USA, may 12-14
    , 1 (2005) 201-204
    doi: 10.1109/MMB.2005.1548426
  15. Nanomachined electrospray ionisation tips
    DESCATOIRE C., TROADEC D., ASHCROFT A., BUCHAILLOT L., ARSCOTT S.
    9th Annual European Conference on Micro & Nanoscale Technologies for the Biosciences, NanoTech 2005, Montreux, Switzerland, november 15-17
    (2005) 122-123
  16. Realization of millimeter-wave planar antennas on PDMS
    TIERCELIN N., COQUET P., SAULEAU R., SENEZ V., FUJITA H.
    13th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS'05, Seoul, South Korea, june 5-9
    , 2 (2005) 2/1994-1997
    doi: 10.1109/SENSOR.2005.1497492
  17. Reliability of non-released microstructures : failure analysis and innovative solution process
    MILLET O., MULLER P., BLANRUE O., LEGRAND B., COLLARD D., BUCHAILLOT L.
    13th International Conference on Solid State Sensors, Actuators and Microsystems, TRANSDUCERS'05, Seoul, South Korea, june 5-9
    , 1 (2005) 1/840-842
    doi: 10.1109/SENSOR.2005.1496548
  18. RF blade nano-electromechanical resonator with self-aligned process for definition of lateral electrostatic transducers
    AGACHE V., LEGRAND B., COLLARD D., FUJITA H., BUCHAILLOT L., , , , , , , , , ,
    Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2005, Montreux, Switzerland, june 1-3
    (2005) 26-31
  19. Stiction drive operation of micromotors : direct and reverse rotation control
    LEGRAND B., COLLARD D., BUCHAILLOT L.
    13th International Conference on Solid State Sensors, Actuators and Microsystems, TRANSDUCERS'05, Seoul, South Korea, june 5-9
    , 1 (2005) 1/57-60
    doi: 10.1109/SENSOR.2005.1496358
  20. SU-8 based arch-like microfluidic microchannels using single mask/single step photolithography
    GAUDET M., ARSCOTT S., CAMART J.C., BUCHAILLOT L.
    9th International Conference on Miniaturized Systems for Chemistry and Life Sciences, µTAS 2005, Boston, MA, USA, october 9-13
    , 2 (2005) 1189-1192
  21. Tensile stress determination in silicon nitride membrane by AFM characterization
    ROLLIER A.S., LEGRAND B., DERESMES D., LAGOUGE M., COLLARD D., BUCHAILLOT L.
    13th International Conference on Solid State Sensors, Actuators and Microsystems, TRANSDUCERS'05, Seoul, South Korea, june 5-9
    , 1 (2005) 1/828-831
    doi: 10.1109/SENSOR.2005.1496545
  22. The 2D feedback conveyance with ciliary actuator arrays
    ATAKA M., LEGRAND B., BUCHAILLOT L., COLLARD D., FUJITA H.
    13th International Conference on Solid State Sensors, Actuators and Microsystems, TRANSDUCERS'05, Seoul, South Korea, june 5-9
    , 1 (2005) 1/31-34
    doi: 10.1109/SENSOR.2005.1496351
  23. Thermal and electrostatic reliability characterization in RF MEMS switches
    DUONG Q.H., BUCHAILLOT L., COLLARD D., SCHMITT P., LAFONTAN X., PONS P., FLOURENS F., PRESSECQ F.
    16th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis, Arcachon, France, october 10-14
    Microelectron. Reliab., 45, 9-11 (2005) 1790-1793
    doi: 10.1016/j.microrel.2005.07.095
  24. Very high sensitivity polysilicon cantilever electrospray ionisation tips compatible with standard analytical chromatography fittings
    ARSCOTT S., LE GAC S., ROLANDO C.
    9th International Conference on Miniaturized Systems for Chemistry and Life Sciences, µTAS 2005, Boston, MA, USA, october 9-13
    , 2 (2005) 1504-1507

Invited: 1

  1. Nanotechnologie, micro et nanosystèmes
    LEGRAND B.
    5ème Colloque International TELECOM’2005 & 4èmes Journées Franco-Magrhébines des Micro-ondes et leurs Applications, JFMMA, Rabat, Maroc, 23-25 mars, 2005, 13-22

2004: 13

  1. An original methodology to assess fatigue behavior in RF MEMS devices
    MILLET O., BERTRAND P., LEGRAND B., COLLARD D., BUCHAILLOT L.
    34th European Microwave Conference, EuMC 2004, Amsterdam, The Nerderlands, october 12-14
    , 1 (2004) 69-72
    http://ieeexplore.ieee.org/search/searchresult.jsp?arnumber=1412518
  2. Characterization of individual bio-cells with thermally actuated probe arrays
    CHO Y.H., COLLARD D., BUCHAILLOT L., LEGRAND B., BEOMJOON K.
    Symposium of Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2004, Montreux, Switzerland, may 12-14
    (2004) 425-429, ISBN 2-84813-026-1
  3. Evaluation of electrical impedance spectra for single biocells in microfluidic devices using combined FEMLAB/ HSPICE simulated models
    SENEZ V., YAMAMOTO T., POUSSARD B., FUKUBA T., CAPRON J.M., FUJII T.
    NSTI Nanotechnology Conference and Trade Show, Boston, MA, USA, march 7-11
    , 1 (2004) 99-102
    http://www.nsti.org/procs/Nanotech2004v1/2/W52.07
  4. From the mechanical analysis of a polyarticulated microgripper to the design of a compliant microgripper
    BERNARDONI P., RIWAN A., TSITSIRIS H., MILLET O., BUCHAILLOT L., REGNIER S., BIDAUD P.
    SPIE Smart Structures and Materials - Modelings, Signal Processing, and Control, San Diego, CA, USA, march 16-17
    Proc. SPIE-Int. soc. opt. eng., 5383, 1 (2004) 469-477
    doi: 10.1117/12.539526
  5. Microactuators and microstrip antenna for polarization diversity
    LE GAREC L., ROCH I., HIMDI M., SAULEAU R., MILLET O., BUCHAILLOT L.
    5th Workshop on MEMS for Millimeter-Wave Communications, MEMSWAVE 2004, Uppsala, Sweden, june 30-july 2
    (2004) D16-D19
  6. Microfluidic devices to measure the electrical impedance of single bio-cells
    SENEZ V., YAMAMOTO T., POUSSARD B., FUKUBA T., CAPRON J.M., FUJII T.
    Joint XIIth International Conference on Electrical Bio-Impedance and Vth Electrical Impedance Tomography, ICEBI'04/EIT, Gdansk, Poland, june 20-24
    , 1 (2004) 53-56
  7. New H-shape RF microswitch design for microwave and millimeter-wave applications
    FRYZIEL M., BOE A., VANOVERSCHELDE C., ROLLAND N., MULLER P., BUCHAILLOT L., ROLLAND P.
    5th Workshop on MEMS for Millimeter Wave Communication, MEMSWAVE 2004, Uppsala, Sweden, june 30-july 2
    (2004) B1-B6
  8. Novel 2D interfaces for nanoelectrospray mass spectrometry
    ARSCOTT S., LE GAC S., DRUON C., TABOURIER P., ROLANDO C.
    NSTI Nanotechnology Conference and Trade Show, Boston, MA, USA, march 7-11
    , 1 (2004) 1/316-319, ISBN 0-9728422-7-6
    https://www.nsti.org/publications/Nanotech/2004/pdf/B1-83.pdf
  9. Novel microfabricated nano-ESI interfaces to be integrated onto a microsystem
    ARSCOTT S., LE GAC S., ROLANDO C.
    8th International Conference on Miniaturized Systems for Chemistry and Life Sciences, µTAS 2004, Malmö, Sweden, september 26-30
    , 1 (2004) 515-518
  10. Numerical analysis of the process induced stresses in micromachined cantilever
    SENEZ V., HOFFMANN T.
    1st International Symposium on Micro & Nano Technology, ISMNT-1, Honolulu, HI, USA, march 14-17
    (2004) 126-131
  11. Predictive modelling of the fatigue phenomenon for polycristalline structural layers
    MILLET O., BERTRAND P., LEGRAND B., COLLARD D., BUCHAILLOT L.
    17th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2004, Maastricht, Netherlands, january 25-29
    (2004) 145-148
    doi: 10.1109/MEMS.2004.1290543
  12. Reliability of polycrystalline MEMS : prediction of the debugging-time
    MILLET O., BERTRAND P., LEGRAND B., COLLARD D., BUCHAILLOT L.
    30th International Symposium for Testing and Failure Analysis, ISTFA 2004, Worcester, MA, USA, november 14-18
    (2004) 221-224
  13. Fabrication and optimization of bimorph micro probes for the measurement of individual biocells
    CHO Y.H., COLLARD D., BUCHAILLOT L., CONSEIL F., KIM B.J.
    Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2004, Montreux, Switzerland, may 12-14
    Microsyst. Technol., 12, 1-2 (2005) 30-37
    doi: 10.1007/s00542-005-0010-1

2003: 17

  1. 2½ D microfabricated nib-like sources for nanoelectrospray applications
    LE GAC S., ARSCOTT S., ROLANDO C.
    7th International Conference on Miniaturized Systems for Chemistry and Life Sciences, µTAS 2003, Squaw Valley, CA, USA, october 5-9
    , 2 (2003) 1211-1214
  2. A 100V-IC for the remote powering and control of a microrobot using an electrostatic ciliary motion system
    BASSET P., KAISER A., STEFANELLI B., WALENNE M., COLLARD D., BUCHAILLOT L.
    12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS'03, Boston, MA, USA, june 8-12
    , 2 (2003) 1711-1713
  3. Feedback of MEMS reliability study on the design stage : a step toward reliability aided design (RAD)
    BUCHAILLOT L.
    14th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis, ESREF 2003, Arcachon, France, 6-10 octobre
    Microelectron. Reliab., 43, 9-11 (2003) 1919-1928
  4. Micro gripper driven by SDAs coupled to an amplification mechanism
    MILLET O., BERNARDONI P., REGNIER S., BIDAUD P., COLLARD D., BUCHAILLOT L.
    12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS'03, Boston, MA, USA, june 8-12
    , 1 (2003) 280-283
  5. Micro-electromechanical variable-bandwidth IF frequency filters with tunable electrostatical coupling spring
    GALAYKO D., KAISER A., BUCHAILLOT L., COLLARD D., COMBI C.
    IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems, MEMS'2003, Kyoto, Japan, january 19-23
    (2003) 153-156
  6. Microfluidic systems for high-throughput proteomics
    LE GAC S., ARSCOTT S., DRUON C., TABOURIER P., ROLANDO C.
    NSTI Nanotechnology Conference and Trade Show, San Francisco, CA, USA, february 23-27
    , 1 (2003) 70-73
  7. Modeling and experimental validation of silicon nanotip oxidation : towards a nanoelectromechanical filter application
    AGACHE V., BIGOTTE P., LEGRAND B., SENEZ V., BUCHAILLOT L., COLLARD D.
    12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS'03, Boston, MA, USA, june 8-12
    , 2 (2003) 1287-1290
  8. Modeling of failure mechanisms for optimized MEMS CAD : design, fabrication and characterization of in situ test benches
    MILLET O., AGACHE V., LEGRAND B., COLLARD D., BUCHAILLOT L.
    12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS'03, Boston, MA, USA, june 8-12
    , 2 (2003) 1578-1581
  9. Nib-like microfabricated two dimensional nano-ESI tips
    LE GAC S., ARSCOTT S., CREN-OLIVE C., ROLANDO C.
    51st ASMS Conference on Mass Spectroscopy, Montreal, Canada, june 8-12
    (2003)
  10. Numerical analysis of the process induced stresses in silicon microstructures
    SENEZ V., HOFFMANN T., ARMIGLIATO A., DE WOLF I.
    SPIE International Symposium on Microelectronics MEMS, and Nanotechnology, Perth, Australia, december 10-12
    Proc. SPIE-Int. soc. opt. eng., 5274, 1 (2003) 350-361
  11. Reliable micromechanical relay for use in rough environment
    CONSEIL F., DERDEIRAN P., RAVAT M.F., COLLARD D., BUCHAILLOT L.
    14th European Microelectronics and Packaging Conference, EMPC 2003, Friedriechshafen, Germany, june 23-25
    (2003) 243-247
  12. Study and realisation of a micromechanical relay for use in harsh environment
    CONSEIL F., DERDERIAN P., RAVAT M.F., COLLARD D., BUCHAILLOT L.
    Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS, DTIP 2003, Cannes, France, may 5-7
    (2003) 108-112
  13. Tapping-mode HF nanometric lateral gap resonators : experimental and theory
    QUEVY E., LEGRAND B., COLLARD D., BUCHAILLOT L.
    12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS'03, Boston, MA, USA, june 8-12
    , 1 (2003) 879-882
  14. Thermally actuated probe arrays for manipulation and characterization of individual bio-cell
    BEOMJOON K., COLLARD D., LAGOUGE M., CONSEIL F., LEGRAND B., BUCHAILLOT L.
    12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS'03, Boston, MA, USA, june 8-12
    , 2 (2003) 1255-1258
  15. Two-dimensional microfabricated sources for nanoelectrospray
    LE GAC S., ARSCOTT S., CREN-OLIVE C., ROLANDO C.
    21st Informal Meeting on Mass Spectrometry, Antwerp, Belgium, may 11-15
    J. Mass Spectrom., 38, 12 (2003) 1259-1264
  16. Ultimate technology for micromachining of nanometric gap HF micromechanical resonators
    QUEVY E., LEGRAND B., COLLARD D., BUCHAILLOT L.
    IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems, MEMS'2003, Kyoto, Japan, january 19-23
    (2003) 157-160
  17. Electrostatic actuated microgripper using an amplification mechanism
    MILLET O., BERNARDONI P., REGNIER S., BIDAUD P., TSITSIRIS E., COLLARD D., BUCHAILLOT L.
    12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS'03, Boston, MA, USA, june 8-12
    Sens. Actuator A-Phys., 114, 2-3 (2004) 371-378
    doi: 10.1016/j.sna.2003.11.004

Invited: 3

  1. Feedback of MEMS reliability study on the design stage : a step toward reliability aided design (RAD)
    BUCHAILLOT L.
    14th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis, ESREF 2003, Arcachon, France, 6-10 octobre, 2003
  2. Les microtechnologies et les microsystèmes : donnez du mouvement à la microélectronique
    BUCHAILLOT L.
    Journée des électroniciens, Obernai, France, 15 mai, 2003
  3. LIMMS : France-Japan initiative for collaboration on micro and nano-technologies
    SENEZ V., TOSHIYOSHI H., FUJII T., COLLARD D., FUJITA H.
    Nanotechnology Conference and Trade Show, NANOTECH 03, Chiba, Japan, february 26-28, 2003

2002: 6

  1. A large stepwise motion electrostatic actuator for a wireless mircrorobot
    BASSET P., KAISER A., BIGOTTE P., COLLARD D., BUCHAILLOT L.
    Fifteenth IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2002, Las Vegas, NV, USA, january 20-24
    (2002) 606-609
  2. Clamped-clamped beam micro-mechanical resonators in thick-film epitaxial polysilicon technology
    GALAYKO D., KAISER A., LEGRAND B., BUCHAILLOT L., COMBI C., COLLARD D.
    32nd European Solid-State Device Research Conference, ESSDERC 2002, Firenze, Italy, september 24-26
    (2002) 447-450
  3. High-frequency high-Q micro-mechanical resonators in thick epipoly technology with post-process gap adjustment
    GALAYKO D., KAISER A., LEGRAND B., COMBI C., COLLARD D., BUCHAILLOT L.
    15th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2002, Las Vegas, NV, USA, january 20-24
    (2002) 665-668
  4. Reliability of packaging MEMS in shock environment : crack and stiction modeling
    MILLET O., COLLARD D., BUCHAILLOT L.
    Design, Test, Integration, and Packaging of MEMS/MOEMS, DTIP 2002, Cannes, France, may 6-8
    Proc. SPIE-Int. soc. opt. eng., 4755 (2002) 696-703
  5. Reliability of polysilicon microstructures : in situ test benches
    MILLET O., BUCHAILLOT L., COLLARD D.
    13th Symposium on the Realibility of Electron Devices, Failure Physics and Analysis, ESREF 2002, Rimini, Italy, october 7-11
    Microelectron. Reliab., 42, 9-11 (2002) 1795-1800
  6. Study of adhesive forces on a silicon nanotip force microscope in contact mode
    AGACHE V., LEGRAND B., COLLARD D., BUCHAILLOT L.
    Design, Test, Integration, and Packaging of MEMS/MOEMS, DTIP 2002, Cannes, France, may 6-8
    Proc. SPIE-Int. soc. opt. eng., 4755 (2002) 601-612

Invited: 1

  1. BIOMEMS activities at LIMMS/CNRS-IIS
    SENEZ V., CABODEVILA G., TIXIER-MITA A., CAMOU S., DENOUAL M., LECLERC E., FUJII T., FUJITA H.
    8th International Micromachine Symposium, Tokyo, Japan, november 13-14, 2002

2001: 14

  1. 3D self-assembled micro-actuators for optical applications
    QUEVY E., BUCHAILLOT L., COLLARD D.
    11th International Conference on Solid-State Sensors and Actuators, Transducers '01/Eurosensors XV, Munich, Germany, june 10-14
    , 1 (2001) 764-767
  2. Design of an autonomous micro robot
    BASSET P., BUCHAILLOT L., KAISER A., COLLARD D.
    8th International Conference on Emerging Technologies and Factory Automation, ETFA 2001, Antibes-Juan les Pins, France, october 15-18
    , 2 (2001) 795-798
  3. Electrostatic impact-drive microactuator
    MITA Y.Y., ARAI M., TENSEKA S., KOBAYASHI D., BASSET P., KAISER A., MASQUELIER P., BUCHAILLOT L., COLLARD D., FUJITA H.
    14th IEEE International Conference on Micro Electro Mechanical Systems, MEMS'2001, Interlaken, Switzerland, january 21-25
    (2001) 590-593
  4. Finite element modeling of smart materials : application to an adaptive structure using SMA
    HLADKY-HENNION A.C., RAFANOMEZANTSOA S., BUCHAILLOT L., BOUCHILLOUX P.
    Smart Structures and Materials 2001 : Modeling, Signal Processing, and Control in Smart Structures, Newport Beach, CA, USA, march 5-8
    Proc. SPIE-Int. soc. opt. eng., 4326 (2001) 143-150
  5. IF MEMS filters for mobile communication
    QUEVY E., GALAYKO D., LEGRAND B., RENAUX C., COMBI C., FLANDRE D., BUCHAILLOT L., COLLARD D., VIGNA B., KAISER A.
    8th International Conference on Emerging Technologies and Factory Automation, ETFA 2001, Antibes-Juan les Pins, France, october 15-18
    , 2 (2001) 733-736
  6. MEMS for mobile communication
    QUEVY E., RENAUX C., BUCHAILLOT L., FLANDRE D., COLLARD D.
    13th European Microelectronics and Packaging Conference, EMPC 2001, Strasbourg, France, may 30-june 1
    (2001) 129-134
  7. New actuation structure for the deformation of continuous mirrors for adaptive optics
    QUEVY E., BUCHAILLOT L., COLLARD D.
    SPIE MEMS Design, Fabrication, Characterization, and Packaging, Edinburgh, UK, may 30-june 1
    Proc. SPIE-Int. soc. opt. eng., 4407 (2001) 211-229
  8. Realization and actuation of continuous-membrane by an array of 3D self-assembling micro-mirrors for adaptive optics
    QUEVY E., BUCHAILLOT L., COLLARD D.
    14th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2001, Interlaken, Switzerland, january 21-25
    (2001) 329-332
  9. Reliability approach in the design of RF microswitches
    BUCHAILLOT L., ROLLAND-HAESE N., ROLLAND P.A.
    13th European Microelectronics and Packging Conference, EMPC 2001, Strasbourg, France, may 30-june 1
    (2001) 111-119
  10. Reliability of self-assembled 3D microstrutures : dynamic snap-through modeling and experimental validation
    MILLET O., BUCHAILLOT L., QUEVY E., COLLARD D.
    SPIE Micromachinig and Microfabrication, Reliability, Testing, and Characterization of MEMS/MOEMS, San Francisco, CA, USA, october 22-24
    Proc. SPIE-Int. soc. opt. eng., 4558 (2001) 97-107
  11. Reliability of self-assembling 3D microstructures : snap-through modeling and experimental validation
    MILLET O., BUCHAILLOT L., QUEVY E., COLLARD D.
    Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2001, Cannes, France, april 25-27
    Proc. SPIE-Int. soc. opt. eng., 4408 (2001) 391-401
  12. Shape memory alloys for microsystems
    ROCH I., DELOBELLE P., WALLART X., COLLARD D., BUCHAILLOT L.
    5th Franco-Japanese Congress and 3rd European-Asian Congress of Mechatronics, Mecatronics'2001, Besançon, France, october 9-11
    (2001) 417-422
  13. Stiction-controlled locking system for three-dimensional self-assembling microstructures : theory and experimental validation
    AGACHE V., BUCHAILLOT L., COLLARD D., QUEVY E.
    Design, Test, Integration, and Packging of MEMS/MOEMS, DTIP 2001, Cannes, France, april 25-27
    Proc. SPIE-Int. soc. opt. eng., 4408 (2001) 344-359
  14. Large stroke actuation of continuous membrane for adaptive optics by 3D self-assembled microplates
    QUEVY E., BIGOTTE P., COLLARD D., BUCHAILLOT L.
    14th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2001, Interlaken, Switzerland, january 21-25
    Sens. Actuator A-Phys., A95, 2-3 (2002) 183-195

Invited: 3

  1. Micro-robotic systems for MIS and micromanipulation
    REGNIER S., ROLLOT Y., GUINOT J.C., HALIYO S., DUMONT G., BUCHAILLOT L., SALLE D., DAHAN M.
    IARP International Workshop on Advanced Robotics Research and Applications, Shangai, China, april 25-27, 2001
  2. Microsystem technology : trends and possible application for textile
    COLLARD D., BUCHAILLOT L., LEGRAND B.
    Conference on Modern Textile Factory, HIGHTEX 2001, Lille, France, avril, 2001
  3. Un état de l'art des microsystèmes
    BUCHAILLOT L.
    Journées d'Electronique Régionale, JER 2001, Marcq en Baroeul, France, 4 décembre, 2001

2000: 6

  1. 3D self-assembling and actuation of electrostatic micro-mirrors
    QUEVY E., BUCHAILLOT L., BIGOTTE P., COLLARD D.
    30th European Solid-State Device Research Conference, ESSDERC 2000, Cork, Ireland, september 11-13
    (2000) 412-415
  2. Experiments on micromanipulation using adhesion forces in unconstained environment
    ROLLOT Y., REGNIER S., HALIYO S., BUCHAILLOT L., GUINOT J.C., BIDAUD P.
    IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 2000, Takamatsu, Japan, october 31-november 5
    , 1 (2000) 653-658
  3. Fabrication process of shape memory alloy thin films for microactuation
    ROCH I., BUCHAILLOT L., WALLART X.
    International Conference on Shape Memory and Superelastic Technologies, SMST-2000, Pacific Grove, CA, USA, april 30-may 4
    (2000) , ISBN-10: 0-9660508-2-7
  4. Finite element modeling of smart materials : application to an adaptative structure using SMA
    HLADKY A.C., RAFANOMEZANTSOA S., BUCHAILLOT L.
    3rd International Workshop on Smart Materials and Structures, CanSmart 2000, St Hubert, Quebec, Canada, september 28-29
    (2000) 133-142
  5. Numerical modelling of shape memory alloy nonlinear behavior laws : application to an adaptative structure
    BUCHAILLOT L., RAFANOMEZANTSOA S., HLADKY A.C., ROCH I.
    International Conference on Shape Memory and Superelastic Technologies, SMST-2000, Pacific Grove, CA, USA, april 30-may 4
    (2000) , ISBN-10: 0-9660508-2-7
  6. Self-assembling of electrostatic micro-mirrors by means of integrated micro-actuators and mechanical latches
    QUEVY E., BUCHAILLOT L., BIGOTTE P., COLLARD D.
    2nd International Workshop on Microfactories, IWMF 2000, Fribourg, Switzerland, october 9-10
    (2000) 191-194

Invited: 2

  1. Microsystème : enjeux et perspectives
    COLLARD D., BUCHAILLOT L., LEGRAND B.
    Journée IMAPS : International Microelectronics and Packaging Society, Lille, France, 11 octobre, 2000
  2. Microsystème : un état des lieux, enjeux et perspectives
    COLLARD D., BUCHAILLOT L., LEGRAND B.
    48èmes Journées Nationales de l'Union des Physiciens, Lille, France, 28-31 octobre, 2000

1999: 5

  1. A 32 bit 100V Switching Array IC ready-for-use for eryone through multi-chip foundry service
    STEFANELLI B., MITA Y., KAISER A., FUJITA H.
    Transducers'99, Japon, juin 1999
    (1999)
  2. Design and prototyping of a MEMS-oriented distributed feedback processor.
    MITA Y., KAISER A., GARDA P., MILGRAM M., FUJITA H.
    MicroNeuro'99, Granada, Espagne, avril 1999
    (1999)
  3. Fabrication and characterization of Ti-Ni shape memory alloy thin films for microsystem design.
    ROCH I., BUCHAILLOT L., COLLARD D.
    MME'99, Micromechanics Europe, Gif sur Yvette, France, 27-28 septembre 1999
    (1999) 32/35
  4. Microstructure en alliage à mémoire de forme Ti-Ni en couche mince : fabrication et caractérisation
    ROCH I., BUCHAILLOT L.
    SF2M'99, Journées d'automne 1999, Paris (France), 02-05 Nov
    (1999)
  5. Modélisation numérique du phénomène de contact dans les moteurs piézo-actifs
    OUAZZANI TOUHAMI H., BUCHAILLOT L., DEBUS J.C..
    4ème Congrès de Mécanique, Mohammadia (Maroc), 13-16 avril
    (1999)

1998: 5

  1. Contact modelling by the finite element method : application to the piezoelectric motor
    OUAZZANI TOUHAMI H., DEBUS J.C., BUCHAILLOT L.
    3rd European Mechanics of Materials Conference on Mechanics and Multiphysics Processes in Solids, EMMC3, Oxford, UK, november 23-25
    (1998) 217-226
  2. Mesh Generation and Update Strategies for 3D Numerical Simulation of the Thermal Oxidation Process.
    BOZEK S., SENEZ V., BROCARD D., HERBAUX J., BOSSUT R.
    Proceedings of the International FORTWIHR Conference, Munich, RFA, mars 1998
    (1998)
  3. Microactuators for scanning and other applications.
    GESSNER T, DOETZL W, COLLARD D., FUJITA H.
    Actuators 98 - 6th Intern. Conf. On New Actuators, Bremen, RFA, 17-19 juin 98
    (1998)
  4. Silicon based three-dimensional microsystems: overview and perspectives
    COLLARD D., LANGLET P., BUCHAILLOT L., FUJITA H.
    4th Japan-France Congress, 2nd Asia-Europe Congress on Mechatronics, Fukuoka (Japan), Oct. 6-8
    (1998) 23-29
  5. Contact modelling by the finite element method : application to the piezoelectric motor
    OUAZZANI TOUHAMI H., DEBUS J.C.., BUCHAILLOT L.
    3rd European Mechanics of Materials Conference on Mechanics and Multi-Physics Processes in Solid - Experiments, Modelling, Applications, EUROMECH-MECAMAT 98, Oxford, UK, november 23-25
    J. Phys. IV, 9, PR9 (1999) 217-226
    doi: 10.1051/jp4:1999922

1997: 5

  1. A micro-machined microwave antenna integrated with its electrostatic spatial scanning.
    CHAUVEL D., ROLLAND P.A., ROLLAND-HAESE N., COLLARD D., FUJITA H.
    MEMS'97, Proceedings of the IEEE Micro Electro Mechanical Systems, Nagoya, Japan, 26-30 january 1997
    (1997)
  2. A three-dimensional shape memory alloy loop actuator.
    NAKAMURA Y., NAKAMURA S., BUCHAILLOT L., FUJITA H.
    MEMS'97, Proceedings of the IEEE Micro Electro Mechanical Systems, Nagoya, Japan, 26-30 january 1997
    (1997) 262-266
  3. Constitutive parts of a SMA TiNi thin film catheter.
    BUCHAILLOT L., NAKAMURA S., FUJITA H.
    SMST'97, Monterey, CA, USA, 2-6 mars 1997
    (1997)
  4. Microactuated self-assembling of 3D polysilicon structures with reshaping technology.
    FUKUYA Y., COLLARD D., AKIYAMA T., YANG E.H., FUJITA H.
    MEMS'97, Proceedings of the IEEE Micro Electro Mechanical Systems, Nagoya, Japan, 26-30 january
    (1997)
  5. Strong and weak coupling regime in pillar semiconductor microcavities
    BLOCH J., BOEUF F., GERARD JM., LEGRAND B., MARZIN JY., PLANEL R., THIERRY-MIEG V., COSTARD E.
    MSS 8, Santa Barbara, Juillet
    (1997)

Invited: 1

  1. A quantitative analysis of scratch drive actuation for x/y motion, system.
    LANGLET P., COLLARD D., AKIYAMA T., FUJITA H.
    Transducers'97, Chicago, IL, USA, 16-19 juin 1997, 1997