Les articles du groupe

2017: 11

  1. A user friendly guide to the optimum ultraviolet photolithographic exposure and greyscale dose of SU-8 photoresist on common MEMS, microsystems and microelectronics coatings and materials
    GAUDET Matthieu, ARSCOTT Steve, , , , , , , , , , , , ,
    Anal. Methods, 9, 17 (2017) 2495-2504
    doi: 10.1039/C7AY00564D
  2. Ambipolar spin diffusion in p-type GaAs: a case where spin diffuses more than charge
    CADIZ F., NOTOT V., FILIPOVIC J., PAGET D., WEBER C.P., MARTINELLI L., ROWE A.C.H., ARSCOTT S., , , , , , ,
    J. Appl. Phys., 122, 9 (2017) 095703, 8 pages
    doi: 10.1063/1.4985831
  3. Atomic force microscope based on vertical silicon probes
    WALTER Benjamin, MAIRIAUX Estelle, FAUCHER Marc, , , , , , , , , , , ,
    Appl. Phys. Lett., 110, 24 (2017) 243101, 4 pages
    doi: 10.1063/1.4985125
  4. Estimation of π-π electronic couplings from current measurements
    TRASOBARES Jorge, RECH Jérôme, JONCKEERE Thibaut, MARTIN Thierry, ALEVEQUE Olivier, LEVILLAIN Eric, DIEZCABANES V., OLIVIER Yoann, CORNIL Jérôme, NYS Jean-Philippe, SIVAKUMARASAMY Ragavendran, SMAALI Kacem, LECLERE P., FUJIWARA Akira, THERON Didier, VUILLAUME Dominique, CLEMENT Nicolas
    Nano Lett., 17, 5 (2017) 3215-3224
    doi: 10.1021/acs.nanolett.7b00804
  5. Gallium nitride MEMS resonators : how residual stress impacts design and performances
    MORELLE Christophe, THERON Didier, DERLUYN Joff, DEGROOTE Stefan, GERMAIN Marianne, ZHANG Victor, BUCHAILLOT Lionel, GRIMBERT Bertrand, TILMANT Pascal, VAURETTE François, ROCH-JEUNE Isabelle, BRANDLI Virginie, AVRAMOVIC Vanessa, OKADA Etienne, FAUCHER Marc
    Microsyst. Technol., (2017) 7 pages
    doi: 10.1007/s00542-017-3293-0
  6. Improved analytical modelling and finite element verification of stressed GaN microbeam resonators by piezoelectric actuation
    ZHANG Victor, FAUCHER Marc, THERON Didier, MORELLE Christophe, BUCHAILLOT Lionel, , , , , , , , , ,
    J. Micromech. Microeng., 27, 9 (2017) 095001, 9 pages
    doi: 10.1088/1361-6439/aa78d8
  7. Influence of metal-organic vapor phase epitaxy parameters and Si(111) substrate type on the properties of AlGaN/GaN HEMTs with thin simple buffer
    FRAYSSINET Eric, LECLAIRE Paul, MOHDAD Jad, LATRACH Soumaya, CHENOT Sébastien, NEMOZ Maud, DAMILANO Benjamin, CORDIER Yvon, , , , , , ,
    Phys. Status Solidi A-Appl. Mat. Sci., 214 , 4 (2017) 1600419, 8 pages
    doi: 10.1002/pssa.201600419
  8. Luminescence imaging of photoelectron spin precession during drift in a p-type GaAs microfabricated Hall bar
    NOTOT V., PAGET D., ROWE A.C.H., MARTINELLI L., CADIZ F., ARSCOTT S., , , , , , , , ,
    J. Appl. Phys., 121, 12 (2017) 125703, 7 pages
    doi: 10.1063/1.4979097
  9. Multi-MHz micro-electro-mechanical sensors for atomic force microscopy
    LEGRAND Bernard, SALVETAT Jean-Paul, WALTER Benjamin, FAUCHER Marc, THERON Didier, AIME Jean-Pierre, , , , , , , , ,
    Ultramicroscopy, 175 (2017) 46-57
    doi: 10.1016/j.ultramic.2017.01.005
  10. Spin and recombination dynamics of excitons and free electrons in p-type GaAs: effect of carrier density
    CADIZ F., LAGARDE D., RENUCCI P., PAGET D., AMAND T., CARRERE H., ROWE A.C.H., ARSCOTT S., , , , , , ,
    Appl. Phys. Lett., 110, 8 (2017) 082101, 5 pages
    doi: 10.1063/1.4977003
  11. Sputtered titanium carbide thick film for high areal energy on chip carbon-based micro-supercapacitors
    LETICHE Manon, BROUSSE Kevin, DEMORTIERE Arnaud, HUANG Peihua, DAFFOS Barbara, PINAUD Sébastien, RESPAUD Marc, CHAUDRET Bruno, ROUSSEL Pascal, BUCHAILLOT Lionel, TABERNA Pierre Louis, SIMON Patrice, LETHIEN Christophe, ,
    Adv. Funct. Mater., 27, 20 (2017) 1606813, 10 pages
    doi: 10.1002/adfm.201606813

2016: 7

  1. A 17 GHz molecular rectifier
    TRASOBARES Jorge, VUILLAUME Dominique, THERON Didier, CLEMENT Nicolas, , , , , , , , , , ,
    Nat. Commun., 7 (2016) 12850, 9 pages
    doi: 10.1038/ncomms12850
  2. Automated calibration of RF on-wafer probing and evaluation of probe misalignment effects using a desktop micro-factory
    VON KLEIST-RETZOW Fabian T., TIEMERDING T., ELFERT P., HAENSSLER Olaf C., FATIKOW Sergej, , , , , , , , , ,
    J. Comput. Commun., 4, 3 (2016) 61-67, non réferencé dans ISI Web of Knowledge
    doi: 10.4236/jcc.2016.43009
  3. Dynamic chemically driven dewetting, spreading, and self-running of sessile droplets on crystalline silicon
    ARSCOTT Steve, , , , , , , , , , , , , ,
    Langmuir, 32, 48 (2016) 12611-12622
    doi: 10.1021/acs.langmuir.6b03287
  4. Geometric and chemical components of the giant piezoresistance in silicon nanowires
    McCLARTY M.M., JEGENYES N., GAUDET M., TOCCAFONDI C., OSSIKOVSKI R., VAURETTE F., ARSCOTT S., ROWE A.C.H., , , , , , ,
    Appl. Phys. Lett., 109, 2 (2016) 023102, 4 pages
    doi: 10.1063/1.4955403
  5. Optimization of a microelectromechanical systems (MEMS) approach for miniaturized microcantilever-based RF microwave probes
    MARZOUK J., ARSCOTT S., EL FELLAHI A., HADDADI K., BOYAVAL C., LEPILLIET S., LASRI T., DAMBRINE G., , , , , , ,
    Sens. Actuator A-Phys., 238 (2016) 51-59
    doi: 10.1016/j.sna.2015.10.043
  6. Piezoelectric MEMS resonators based on ultrathin epitaxial GaN heterostructures on Si
    LECLAIRE Paul, FRAYSSINET Eric, MORELLE Christophe, CORDIER Yvon, THERON Didier, FAUCHER Marc, , , , , , , , ,
    J. Micromech. Microeng., 26, 10 (2016) 105015, 6 pages
    doi: 10.1088/0960-1317/26/10/105015
  7. Stick-jump (SJ) evaporation of strongly pinned nanoliter volume sessile water droplets on quick drying, micropatterned surfaces
    DEBUISSON Damien, MERLEN Alain, SENEZ Vincent, ARSCOTT Steve, , , , , , , , , , ,
    Langmuir, 32, 11 (2016) 2679-2686
    doi: 10.1021/acs.langmuir.6b00070

2015: 14

  1. Absence of carrier separation in ambipolar charge and spin drift in p+-GaAs
    CADIZ F., PAGET D., ROWE A.C.H., MARTINELLI L., ARSCOTT S., , , , , , , , , ,
    Appl. Phys. Lett., 107, 16 (2015) 162101, 5 pages
    doi: 10.1063/1.4933189
  2. Ambipolar spin-spin coupling in p+-GaAs
    CADIZ F., PAGET D., ROWE A.C.H., ARSCOTT S., , , , , , , , , , ,
    Phys. Rev. B, 92, 12 (2015) 121203(R), 4 pages
    doi: 10.1103/PhysRevB.92.121203
  3. Central role of electronic temperature for photoelectron charge and spin mobilities in p+-GaAs
    CADIZ F., PAGET D., ROWE A.C.H., PEYTAVIT E., ARSCOTT S., , , , , , , , , ,
    Appl. Phys. Lett., 106, 9 (2015) 092108, 4 pages
    doi: 10.1063/1.4914357
  4. Controlled mud-crack patterning and self-organized cracking of polydimethylsiloxane elastomer surfaces
    SEGHIR Rian, ARSCOTT Steve, , , , , , , , , , , , ,
    Sci. Rep., 5 (2015) 14787, 16 pages
    doi: 10.1038/srep14787
  5. Design and measurement of AFM probe based on MEMS resonator
    XIONG Z., LEGRAND B.
    High Power Laser and Particle Beams, 27, 2 (2015) 0241195, 5 pages, non réferencé dans ISI Web of Knowledge
    http://www.hplpb.com.cn/CN/Y2015/V27/I02/27024119
  6. Effect of the Pauli principle on photoelectron spin transport in p+GaAs
    CADIZ F., PAGET D., ROWE A.C.H., AMAND T., BARATE P., ARSCOTT S., , , , , , , , ,
    Phys. Rev. B, 91, 16 (2015) 165203, 13 pages
    doi: 10.1103/PhysRevB.91.165203
  7. Erratum to “Gallium nitride as an electromechanical material”
    RAIS-ZADEH M., GOKHALE V.J., FAUCHER M., THERON D., CORDIER Y., BUCHAILLOT L.
    J. Microelectromech. Syst., 24, 1 (2015) 249-249
    doi: 10.1109/JMEMS.2014.2376351
  8. Extended PDMS stiffness range for flexible systems
    SEGHIR R., ARSCOTT S., , , , , , , , , , , , ,
    Sens. Actuator A-Phys., 230 (2015) 33-39
    doi: 10.1016/j.sna.2015.04.011
  9. Integrated MEMS RF probe for SEM station - Pad size and parasitic capacitance reduction
    EL FELLAHI A., HADDADI K., MARZOUK J., ARSCOTT S., BOYAVAL C., LASRI T., DAMBRINE G., , , , , , , ,
    IEEE Microw. Wirel. Compon. Lett., 25, 10 (2015) 693-695
    doi: 10.1109/LMWC.2015.2463213
  10. Mechanically robust, electrically stable metal arrays on plasma-oxidized polydimethylsiloxane for stretchable technologies
    SEGHIR R., ARSCOTT S., , , , , , , , , , , , ,
    J. Appl. Phys., 118, 4 (2015) 045309, 8 pages
    doi: 10.1063/1.4927616
  11. MEMS probes for on-wafer RF microwave characterization of future microelectronics : design, fabrication and characterization
    MARZOUK J., ARSCOTT S., EL FELLAHI A., HADDADI K., LASRI T., BOYAVAL C., DAMBRINE G., , , , , , , ,
    J. Micromech. Microeng., 25 , 7 (2015) 075024, 11 pages
    doi: 10.1088/0960-1317/25/7/075024
  12. Modeling and de-embedding the interferometric scanning microwave microscopy by means of dopant profile calibration
    MICHALAS L., WANG F., BRILLARD C., CHEVALIER N., HARTMANN J.M., MARCELLI R., THERON D., , , , , , , ,
    Appl. Phys. Lett., 107, 22 (2015) 223102, 5 pages
    doi: 10.1063/1.4936761
  13. Photo-hardenable and patternable PDMS/SU-8 hybrid functional material: a smart substrate for flexible systems
    SEGHIR R., ARSCOTT S., , , , , , , , , , , , ,
    J. Polym. Sci. Pt. B-Polym. Phys., 53, 18 (2015) 1281-1291
    doi: 10.1002/polb.23773
  14. What is the shape of an air bubble on a liquid surface ?
    TEIXEIRA M.A.C., ARSCOTT S., COX S.J., TEIXEIRA P.I.C., , , , , , , , , , ,
    Langmuir, 31, 51 (2015) 13708-13717
    doi: 10.1021/acs.langmuir.5b03970

2014: 13

  1. [Invited Review] Electrowetting and semiconductors
    ARSCOTT S., , , , , , , , , , , , , ,
    RSC Adv., 4, 55 (2014) 29223-29238
    doi: 10.1039/C4RA04187A
  2. [Invited Review] SU-8 as a material for lab-on-a-chip-based mass spectrometry
    ARSCOTT S., , , , , , , , , , , , , ,
    Lab Chip, 14, 19 (2014) 3668-3689, selected as « hot article »
    doi: 10.1039/C4LC00617H
  3. A novel dog-bone oscillating AFM probe with thermal actuation and piezoresistive detection
    XIONG Z., MAIRIAUX E., WALTER B., FAUCHER M., BUCHAILLOT L., LEGRAND B., , , , , , , , ,
    Sensors, 14, 11 (2014) 20667-20686
    doi: 10.3390/s141120667
  4. AlGaN/GaN HEMTs with very thin buffer on Si (111) for nanosystems applications
    LECLAIRE P., CHENOT S., BUCHAILLOT L., CORDIER Y., THERON D., FAUCHER M., , , , , , , , ,
    Semicond. Sci. Technol., 29, 11 (2014) 115018, 9 pages
    doi: 10.1088/0268-1242/29/11/115018
  5. All optical method for investigation of spin and charge transport in semiconductors: combination of spatially and time-resolved luminescence
    CADIZ F., BARATE P., PAGET D., GREBENKOV D., KORB J.P., ROWE A.C.H., AMAND T., ARSCOTT S., PEYTAVIT E., , , , , ,
    J. Appl. Phys., 116, 2 (2014) 023711, 9 pages
    doi: 10.1063/1.4889799
  6. Continuous electrowetting at the low concentration electrolyte-insulator-semiconductor junction
    ARSCOTT S., , , , , , , , , , , , , ,
    Appl. Phys. Lett., 105, 23 (2014) 231604, 4 pages
    doi: 10.1063/1.4903513
  7. Cross-talk artefacts in Kelvin probe force microscopy imaging: a comprehensive study
    BARBET S., POPOFF M., DIESINGER H., DERESMES D., THERON D., MELIN T., , , , , , , , ,
    J. Appl. Phys., 115, 14 (2014) 144313, 11 pages
    doi: 10.1063/1.4870710
  8. Gallium nitride as an electromechanical material
    RAIS-ZADEH M., GOKHALE V.J., ANSARI A., FAUCHER M., THERON D., CORDIER Y., BUCHAILLOT L., , , , , , , ,
    J. Microelectromech. Syst., 23, 6 (2014) 1252-1271
    doi: 10.1109/JMEMS.2014.2352617
  9. High speed e-beam lithography for gold nanoarray fabrication and use in nanotechnology
    TRASOBARES J., VAURETTE F., FRANÇOIS M., ROMIJN H., CODRON J.L., VUILLAUME D., THERON D., CLEMENT N., , , , , , ,
    Beilstein J. Nanotechnol., 5 (2014) 1918-1925
    doi: 10.3762/bjnano.5.202
  10. Measurement techniques for RF nanoelectronic devices: new equipment to overcome the problems of impedance and scale mismatch
    HAPPY H., HADDADI K., THERON D., LASRI T., DAMBRINE G., , , , , , , , , ,
    IEEE Microw. Mag., 15, 1 (2014) 30-39
    doi: 10.1109/MMM.2013.2288710
  11. Optimization of the optical properties of nanostructured silicon surfaces for solar cell applications
    ZHOU D., PENNEC Y., DJAFARI-ROUHANI B., CRISTINI-ROBBE O., XU T., LAMBERT Y., DEBLOCK Y., FAUCHER M., STIEVENARD D., , , , , ,
    J. Appl. Phys., 115, 13 (2014) 134304, 10 pages
    doi: 10.1063/1.4870236
  12. Quantitative impedance characterization of sub-10 nm scale capacitors and tunnel junctions with an interferometric scanning microwave microscope
    WANG F., CLEMENT N., DUCATTEAU D., TROADEC D., TANBAKUCHI H., LEGRAND B., DAMBRINE G., THERON D., , , , , , ,
    Nanotechnology, 25 , 40 (2014) 405703, 7 pages
    doi: 10.1088/0957-4484/25/40/405703
  13. Young's modulus extraction of epitaxial heterostructure AlGaN/GaN for MEMS application
    BEN AMAR A., FAUCHER M., BRANDLI V., CORDIER Y., THERON D., , , , , , , , , ,
    Phys. Status Solidi A-Appl. Mat. Sci., 211, 7 (2014) 1655-1659
    doi: 10.1002/pssa.201330339

2013: 11

  1. An interferometric scanning microwave microscope and calibration method for sub-fF microwave measurements
    DARGENT T., HADDADI K., LASRI T., CLEMENT N., DUCATTEAU D., LEGRAND B., TANBAKUCHI H., THERON D., , , , , , ,
    Rev. Sci. Instrum., 84, 12 (2013) 123705, 7 pages
    doi: 10.1063/1.4848995
  2. Detecting response of microelectromechanical resonators by microwave reflectometry
    LEGRAND B., DUCATTEAU D., THERON D., WALTER B., TANBAKUCHI H., , , , , , , , , ,
    Appl. Phys. Lett., 103, 5 (2013) 053124, 5 pages
    doi: 10.1063/1.4817411
  3. Electrowetting at a liquid metal-oxide-semiconductor junction
    ARSCOTT S., , , , , , , , , , , , , ,
    Appl. Phys. Lett., 103, 14 (2013) 144101, 5 pages
    doi: 10.1063/1.4822308
  4. Electrowetting at a liquid metal-semiconductor junction
    ARSCOTT S., GAUDET M.
    Appl. Phys. Lett., 103, 7 (2013) 074104, 4 pages
    doi: 10.1063/1.4818715
  5. Electrowetting of soap bubbles
    ARSCOTT S.
    Appl. Phys. Lett., 103, 1 (2013) 014103, 4 pages
    doi: 10.1063/1.4813308
  6. Experimental demonstration of direct terahertz detection at room-temperature in AlGaN/GaN asymmetric nanochannels
    SANGARE P., DUCOURNAU G., GRIMBERT B., BRANDLI V., FAUCHER M., GAQUIERE C., INIGUEZ-DE-LA-TORRE A., INIGUEZ-DE-LA-TORRE I., MILLITHALER J.F., MATEOS J., GONZALEZ T., , , ,
    J. Appl. Phys., 113, 3 (2013) 034305, 6 pages
    doi: 10.1063/1.4775406
  7. MEMS piezoresistive ring resonator for AFM imaging with pico-Newton force resolution
    XIONG Z., WALTER B., MAIRIAUX E., FAUCHER M., BUCHAILLOT L., LEGRAND B., , , , , , , , ,
    J. Micromech. Microeng., 23, 3 (2013) 035016, 10 pages
    doi: 10.1088/0960-1317/23/3/035016
  8. Non-linear nanochannels for room temperature terahertz heterodyne detection
    TORRES J., NOUVEL P., PENOT A., VARANI L., SANGARE P., GRIMBERT B., FAUCHER M., DUCOURNAU G., GAQUIERE C., INIGUEZ-DE-LA-TORRE I., MATEOS J., GONZALEZ T., , ,
    Semicond. Sci. Technol., 28, 12 (2013) 125024, 6 pages
    doi: 10.1088/0268-1242/28/12/125024
  9. Piezoresistive ring-shaped AFM sensors with pico-newton force resolution
    XIONG Z., WALTER B., MAIRIAUX E., FAUCHER M., BUCHAILLOT L., LEGRAND B.
    Int. J. Intell. Mechatron. Robot., 3, 1 (2013) 38-52, non réferencé dans ISI Web of Knowledge
    doi: 10.4018/ijimr.2013010104
  10. Surface recombination in doped semiconductors: effect of light excitation power and of surface passivation
    CADIZ F., PAGET D., ROWE A.C.H., BERKOVITS V.L., ULIN V.P., ARSCOTT S., PEYTAVIT E., , , , , , , ,
    J. Appl. Phys., 114, 10 (2013) 103711, 10 pages
    doi: 10.1063/1.4821139
  11. Wetting of soap bubbles on hydrophilic, hydrophobic, and superhydrophobic surfaces
    ARSCOTT S.
    Appl. Phys. Lett., 102, 25 (2013) 254103, 4 pages
    doi: 10.1063/1.4812710

2012: 12

  1. A GaAs MEMS for AFM and spin injection
    ARSCOTT S., PEYTAVIT E., DERESMES D., DARGENT T., VU D., ROWE A.C.H., PAGET D.
    Sens. Actuator A-Phys., 179 (2012) 10-16
    doi: 10.1016/j.sna.2012.02.033
  2. A snapshot of electrified nanodroplets undergoing Coulomb fission
    ARSCOTT S., DESCATOIRE C., BUCHAILLOT L., ASHCROFT A.E., , , , , , , , , , ,
    Appl. Phys. Lett., 100, 7 (2012) 074103-1-4
    doi: 10.1063/1.3684979
  3. An accurate determination of the surface energy of solid selenium
    GUISBIERS G., ARSCOTT S., SNYDERS R., , , , , , , , , , , ,
    Appl. Phys. Lett., 101, 23 (2012) 231606-1-3
    doi: 10.1063/1.4769358
  4. Bias dependence of gallium nitride micro-electro-mechanical systems actuation using a two-dimensional electron gas
    BEN AMAR A., FAUCHER M., GRIMBERT B., CORDIER Y., FRANÇOIS M., TILMANT P., WERQUIN M., ZHANG V., DUCATTEAU D., GAQUIERE C., BUCHAILLOT L., THERON D., , ,
    Appl. Phys. Express, 5, 6 (2012) 067201-1-3
    doi: 10.1143/APEX.5.067201
  5. Electromechanical transconductance properties of a GaN MEMS resonator with fully integrated HEMT transducers
    FAUCHER M., CORDIER Y., WERQUIN M., BUCHAILLOT L., GAQUIERE C., THERON D., , , , , , , , ,
    J. Microelectromech. Syst., 21, 2 (2012) 370-378
    doi: 10.1109/JMEMS.2011.2179010
  6. Imaging ambipolar diffusion of photocarriers in GaAs thin films
    PAGET D., CADIZ F., ROWE A.C.H., MOREAU F., ARSCOTT S., PEYTAVIT E., , , , , , , , ,
    J. Appl. Phys., 111, 12 (2012) 123720-1-6
    doi: 10.1063/1.4730396
  7. MEMS ring resonators for laserless AFM with sub-nanoNewton force resolution
    ALGRE E., XIONG Z., FAUCHER M., WALTER B., BUCHAILLOT L., LEGRAND B., , , , , , , , ,
    J. Microelectromech. Syst., 21, 2 (2012) 385-397
    doi: 10.1109/JMEMS.2011.2179012
  8. Optical actuation of microelectromechanical systems using photoelectrowetting
    GAUDET M., ARSCOTT S., , , , , , , , , , , , ,
    Appl. Phys. Lett., 100, 22 (2012) 224103-1-4
    doi: 10.1063/1.4723569
  9. Performances of the negative tone resist AZnLOF 2020 for nanotechnology applications
    HERTH E., ALGRE E., TILMANT P., FRANÇOIS M., BOYAVAL C., LEGRAND B.
    IEEE Trans. Nanotechnol., 11, 4 (2012) 854-859
    doi: 10.1109/TNANO.2012.2196802
  10. Photoassisted Fowler-Nordheim-like tunneling from passivated GaAs microcantilevers
    PAGET D., ROWE A.C.H., ARSCOTT S., PEYTAVIT E.
    Phys. Rev. B, 85, 11 (2012) 113301-1-4
    doi: 10.1103/PhysRevB.85.113301
  11. Piezoresistance in silicon at uniaxial compressive stresses up to 3 GPa
    MILNE J.S., FAVORSKIY I., ROWE A.C.H., ARSCOTT S., RENNER C., , , , , , , , , ,
    Phys. Rev. Lett., 108 , 25 (2012) 256801-1-5
    doi: 10.1103/PhysRevLett.108.256801
  12. Searching for THz Gunn oscillations in GaN planar nanodiodes
    INIGUEZ-DE-LA-TORRE A., INIGUEZ-DE-LA-TORRE I., MATEOS J., GONZALEZ T., SANGARE P., FAUCHER M., GRIMBERT B., BRANDLI V., DUCOURNAU G., GAQUIERE C., , , , ,
    J. Appl. Phys., 111, 11 (2012) 113705-1-9
    doi: 10.1063/1.4724350

2011: 8

  1. Digital image correlation of metal nanofilms on SU-8 for flexible electronics and MEMS
    ROLAND T., ARSCOTT S., SABATIER L., BUCHAILLOT L., CHARKALUK E., , , , , , , , , ,
    J. Micromech. Microeng., 21, 12 (2011) 125005-1-8
    doi: 10.1088/0960-1317/21/12/125005
  2. Moving liquids with light: photoelectrowetting on semiconductors
    ARSCOTT S., , , , , , , , , , , , , ,
    Sci. Rep., 1 (2011) 184-1-7
    doi: 10.1038/srep00184
  3. Persistence of superconductivity in niobium ultrathin films grown on R-plane sapphire
    DELACOUR C., ORTEGA L., FAUCHER M., CROZES T., FOURNIER T., PANNETIER B., BOUCHIAT V., , , , , , , ,
    Phys. Rev. B, 83, 14 (2011) 144504-1-8
    doi: 10.1103/PhysRevB.83.144504
  4. Quantitative (artifact-free) surface potential measurements using Kelvin force microscopy
    MELIN T., BARBET S., DIESINGER H., THERON D., DERESMES D., , , , , , , , , ,
    Rev. Sci. Instrum., 82, 3 (2011) 036101-1-3
    doi: 10.1063/1.3516046
  5. Spin-dependent photoelectron tunneling from GaAs into magnetic cobalt
    VU D., JURCA H.F., MAROUN F., ALLONGUE P., TOURNERIE N., ROWE A.C.H., PAGET D., ARSCOTT S., PEYTAVIT E.
    Phys. Rev. B, 83, 12 (2011) 121304-1-4(R)
    doi: 10.1103/PhysRevB.83.121304
  6. SU-8 micropatterning for microfluidic droplet and microparticle focusing
    DEBUISSON D., SENEZ V., ARSCOTT S., , , , , , , , , , , ,
    J. Micromech. Microeng., 21, 6 (2011) 065011-1-9
    doi: 10.1088/0960-1317/21/6/065011
  7. Tunable contact angle hysteresis by micropatterning surfaces
    DEBUISSON D., SENEZ V., ARSCOTT S., , , , , , , , , , , ,
    Appl. Phys. Lett., 98, 18 (2011) 184101-1-3
    doi: 10.1063/1.3576921
  8. Wetting on smooth micropatterned defects
    DEBUISSON D., DUFOUR R., SENEZ V., ARSCOTT S., , , , , , , , , , ,
    Appl. Phys. Lett., 99, 18 (2011) 184101-1-3
    doi: 10.1063/1.3657140

2010: 12

  1. Circularly polarized luminescence microscopy for the imaging of charge and spin diffusion in semiconductors
    FAVORSKIY I., VU D., PEYTAVIT E., ARSCOTT S., PAGET D., ROWE A.C.H., , , , , , , , ,
    Rev. Sci. Instrum., 81, 10 (2010) 103902-1-4
    doi: 10.1063/1.3493047
  2. Development of a new generation of active AFM tools for applications in liquids
    ROLLIER A.S., JENKINS D.F.L., DOGHECHE E., LEGRAND B., FAUCHER M., BUCHAILLOT L., , , , , , , , ,
    J. Micromech. Microeng., 20, 8 (2010) 085010-1-11
    doi: 10.1088/0960-1317/20/8/085010
  3. Electron beam nanolithography in AZnLOF 2020
    HERTH E., TILMANT P., FAUCHER M., FRANÇOIS M., BOYAVAL C., VAURETTE F., DEBLOCK Y., LEGRAND B., BUCHAILLOT L., , , , , ,
    Microelectron. Eng., 87, 11 (2010) 2057-2060
    doi: 10.1016/j.mee.2009.12.079
  4. Fabrication of 24-MHz-disk resonators with silicon passive integration technology
    SWOROWSKI M., NEUILLY F., LEGRAND B., SUMMANWAR A., PHILIPPE P., BUCHAILLOT L.
    IEEE Electron Device Lett., 31, 1 (2010) 23-25
    doi: 10.1109/LED.2009.2034542
  5. Fluidic assembly of hybrid MEMS: a GaAs-based microcantilever spin injector
    ARSCOTT S., PEYTAVIT E., VU D., ROWE A.C.H., PAGET D., , , , , , , , , ,
    J. Micromech. Microeng., 20, 2 (2010) 025023-1-8
    doi: 10.1088/0960-1317/20/2/025023
  6. Fracture toughness, hardness, and Young's modulus of tantalum nanocrystalline films
    GUISBIERS G., HERTH E., BUCHAILLOT L., PARDOEN T., , , , , , , , , , ,
    Appl. Phys. Lett., 97, 14 (2010) 143115-1-3
    doi: 10.1063/1.3496000
  7. Giant piezoresistance effects in silicon nanowires and microwires
    MILNE J.S., ROWE A.C.H., ARSCOTT S., RENNER C., , , , , , , , , , ,
    Phys. Rev. Lett., 105, 22 (2010) 226802-1-4
    doi: 10.1103/PhysRevLett.105.226802
  8. Guided acoustic wave resonators using an acoustic Bragg mirror
    KONE I., DOMINGUE F., JACQUINOT H., BOREL M., GORISSE M., REINHARDT A., PARAT G., CASSET F., PELISSIER-TANON D., CARPENTIER J.F., BUCHAILLOT L., DUBUS B., , ,
    Appl. Phys. Lett., 96, 22 (2010) 223504-1-3
    doi: 10.1063/1.3440370
  9. Materials selection procedure for RF-MEMS
    GUISBIERS G., HERTH E., LEGRAND B., ROLLAND N., LASRI T., BUCHAILLOT L., , , , , , , , ,
    Microelectron. Eng., 87, 9 (2010) 1792-1795
    doi: 10.1016/j.mee.2009.10.016
  10. Optimization of SiNX:H films deposited by PECVD for reliability of electronic, microsystems and optical applications
    HERTH E., LEGRAND B., BUCHAILLOT L., ROLLAND N., LASRI T., , , , , , , , , ,
    Microelectron. Reliab., 50, 8 (2010) 1103-1106
    doi: 10.1016/j.microrel.2010.04.011
  11. Photoassisted tunneling from free-standing GaAs thin films into metallic surfaces
    VU D., ARSCOTT S., PEYTAVIT E., RAMDANI R., GIL E., ANDRE Y., BANSROPUN S., GERARD B., ROWE A.C.H., PAGET D.
    Phys. Rev. B, 82, 11 (2010) 115331-1-12
    doi: 10.1103/PhysRevB.82.115331
  12. Theoretical predictions of wurtzite III-nitride nano-materials properties
    GUISBIERS G., LIU D., JIANG Q., BUCHAILLOT L., , , , , , , , , , ,
    Phys. Chem. Chem. Phys., 12, 26 (2010) 7203-7210
    doi: 10.1039/c002496a

2009: 12

  1. Amplified piezoelectric transduction of nanoscale motion in gallium nitride electromechanical resonators
    FAUCHER M., GRIMBERT B., CORDIER Y., BARON N., WILK A., LAHRECHE H., BOVE P., FRANCOIS M., TILMANT P., GEHIN T., LEGRAND C., WERQUIN M., BUCHAILLOT L., GAQUIERE C., THERON D.
    Appl. Phys. Lett., 94, 23 (2009) 233506-1-3
    doi: 10.1063/1.3153504
  2. Comparison of intrinsic residual stress models in metallic thin films
    GUISBIERS G., WAUTELET M., BUCHAILLOT L., , , , , , , , , , , ,
    Scr. Mater., 60, 6 (2009) 419-422
    doi: 10.1016/j.scriptamat.2008.11.014
  3. Design and operation of a silicon ring resonator for force sensing applications above 1 MHz
    WALTER B., FAUCHER M., ALGRE E., LEGRAND B., BOISGARD R., AIME J.P., BUCHAILLOT L., , , , , , , ,
    J. Micromech. Microeng., 19, 11 (2009) 115009-1-7
    doi: 10.1088/0960-1317/19/11/115009
  4. Design, fabrication, and operation of two-dimensional conveyance system with ciliary actuator arrays
    ATAKA M., LEGRAND B., BUCHAILLOT L., COLLARD D., FUJITA H., , , , , , , , , ,
    IEEE-ASME Trans. Mechatron., 14, 1 (2009) 119-125
    doi: 10.1109/TMECH.2008.2004770
  5. Improved fuel use efficiency in microchannel direct methanol fuel cells using a hydrophilic macroporous layer
    KAMITANI A., MORISHITA S., KOTAKI H., ARSCOTT S.
    J. Power Sources, 187, 1 (2009) 148-155
    doi: 10.1016/j.jpowsour.2008.10.085
  6. Investigation of the carbon nanotube AFM tip contacts : free sliding versus pinned contact
    BUCHOUX J., AIME J.P., BOISGARD R., NGUYEN C.V., BUCHAILLOT L., MARSAUDON S., , , , , , , , ,
    Nanotechnology, 20, 47 (2009) 475701-1-8
    doi: 10.1088/0957-4484/20/47/475701
  7. Modeling the melting enthalpy of nanomaterials
    GUISBIERS G., BUCHAILLOT L., , , , , , , , , , , , ,
    J. Phys. Chem. C, 113, 9 (2009) 3566-3568
    doi: 10.1021/jp809338t
  8. Nanocrystallization of anatase or rutile TiO2 by laser treatment
    VAN OVERSCHELDE O., GUISBIERS G., WAUTELET M., , , , , , , , , , , ,
    J. Phys. Chem. C, 113, 34 (2009) 15343-15345
    doi: 10.1021/jp905163j
  9. Optimizing the flux coupling between a nanoSQUID and a magnetic particle using atomic force microscope nanolithography
    FAUCHER M., JUBERT P.O., FRUCHART O., WERNSDORFER W., BOUCHIAT V., , , , , , , , , ,
    Supercond. Sci. Technol., 22, 6 (2009) 064010-1-5
    doi: 10.1088/0953-2048/22/6/064010
  10. Phase diagrams and optical properties of phosphide, arsenide, and antimonide binary and ternary III-V nanoalloys
    GUISBIERS G., WAUTELET M., BUCHAILLOT L., , , , , , , , , , , ,
    Phys. Rev. B, 79, 15 (2009) 155426-1-8
    doi: 10.1103/PhysRevB.79.155426
  11. Towards silicon-nanowire-structured materials by the intimate mixing of patterning the solid state and chemical reactions
    HOURLIER D., LEGRAND B., BOYAVAL C., PERROT P.
    J. Nano Res., 6 (2009) 215-224
    doi: 10.4028/www.scientific.net/JNanoR.6.215
  12. Universal size/shape-dependent law for characteristic temperatures
    GUISBIERS G., BUCHAILLOT L., , , , , , , , , , , , ,
    Phys. Lett. A, 374, 2 (2009) 305-308
    doi: 10.1016/j.physleta.2009.10.054

2008: 9

  1. Giant room-temperature piezoresistance in a metal-silicon hybrid structure
    ROWE A.C.H., DONOSO-BARRERA A., RENNER C., ARSCOTT S., , , , , , , , , , ,
    Phys. Rev. Lett., 100, 14 (2008) 145501-1-4
    doi: 10.1103/PhysRevLett.100.145501
  2. In-plane silicon-on-nothing nanometer-scale resonant suspended gate MOSFET for in-IC integration perspectives
    DURAND C., CASSET F., RENAUX P., ABELE N., LEGRAND B., RENAUD D., OLLIER E., ANCEY P., IONESCU A.M., BUCHAILLOT L., , , , ,
    IEEE Electron Device Lett., 29, 5 (2008) 494-496
    doi: 10.1109/LED.2008.919781
  3. Miniaturized microDMFC using silicon microsystems techniques: performances at low fuel flow rates
    KAMITANI A., MORISHITA S., KOTAKI H., ARSCOTT S., , , , , , , , , , ,
    J. Micromech. Microeng., 18, 12 (2008) 125019-1-9
    doi: 10.1088/0960-1317/18/12/125019
  4. Nanoscale devices for online dielectric spectroscopy of biological cells
    DEBUISSON D., TREIZEBRE A., HOUSSIN T., LECLERC E., BARTES-BIESEL D., LEGRAND D., MAZURIER J., ARSCOTT S., BOCQUET B., SENEZ V., , , , ,
    Physiol. Meas., 29, 6 (2008) S213-S225
    doi: 10.1088/0967-3334/29/6/S19
  5. Post-buckling dynamic behavior of self-assembled 3D microstructures
    BUCHAILLOT L., MILLET O., QUÉVY E., COLLARD D., , , , , , , , , , ,
    Microsyst. Technol., 14, 1 (2008) 69-78
    doi: 10.1007/s00542-007-0400-7
  6. Silicon nanotweezers with subnanometer resolution for the micromanipulation of biomolecules
    YAMAHATA C., COLLARD D., LEGRAND B., TAKEKAWA T., KUMEMURA M., HASHIGUCHI G., FUJITA H., , , , , , , ,
    J. Microelectromech. Syst., 17, 3 (2008) 623-631
    doi: 10.1109/JMEMS.2008.922080
  7. Size and shape effects on creep and diffusion at the nanoscale
    GUISBIERS G., BUCHAILLOT L., , , , , , , , , , , , ,
    Nanotechnology, 19, 43 (2008) 435701-1-5
    doi: 10.1088/0957-4484/19/43/435701
  8. Size, shape, composition, and segregation tuning of InGaAs thermo-optical properties
    GUISBIERS G., ABUDUKELIMU G., WAUTELET M., BUCHAILLOT L., , , , , , , , , , ,
    J. Phys. Chem. C, 112, 46 (2008) 17889-17892
    doi: 10.1021/jp805760h
  9. Thermo-opto-mechanical properties of AlN nanostructures: a promising material for NEMS applications
    GUISBIERS G., BUCHAILLOT L., , , , , , , , , , , , ,
    J. Phys. D-Appl. Phys., 41, 17 (2008) 172001-1-4
    doi: 10.1088/0022-3727/41/17/172001

2007:5

  1. A silicon beam-based microcantilever nanoelectrosprayer
    ARSCOTT S., LEGRAND B., BUCHAILLOT L., ASHCROFT A.E.
    Sens. Actuator B-Chem., 125, 1 (2007) 72-78
    doi: 10.1016/j.snb.2007.01.040
  2. Complete system for wireless powering and remote control of electrostatic actuators by inductive coupling
    BASSET P., KAISER A., LEGRAND B., COLLARD D., BUCHAILLOT L.
    IEEE-ASME Trans. Mechatron., 12, 1 (2007) 23-31
    doi: 10.1109/TMECH.2006.886245
  3. CVD growth of carbon nanotubes at very low pressure of acetylene
    KASUMOV Y.A., SHAILOS A., KHODOS I.I., VOLKOV V.T., LEVASHOV V.I., MATVEEV V.N., GUÉRON S., KOBYLKO M., KOCIAK M., BOUCHIAT H., AGACHE V., ROLLIER A.S., BUCHAILLOT L., BONNOT A.M., KASUMOV A.Y.
    Appl. Phys. A-Mater. Sci. Process., 88, 4 (2007) 687-691
    doi: 10.1007/s00339-007-4028-3
  4. SOI-based nanoelectrospray emitter tips for mass spectrometry : a coupled MEMS and microfluidic design
    LEGRAND B., ASHCROFT A.E., BUCHAILLOT L., ARSCOTT S.
    J. Micromech. Microeng., 17, 3 (2007) 509-514
    doi: 10.1088/0960-1317/17/3/013
  5. Towards mechanical characterization of biomolecules by MNEMS tools
    COLLARD D., YAMAHATA C., LEGRAND B., TAKEKAWA T., KUMEMURA M., SAKAKI N., HASHIGUCHI G., FUJITA H.
    IEEJ Trans. Electr. Electron. Eng., 2, 3 (2007) 262-271
    doi: 10.1002/tee.20154

2006: 14

  1. Alteration of superconductivity and radial breathing modes in suspended ropes of carbon nanotubes by organic polymer coatings
    FERRIER M., KASUMOV A.Y., AGACHE V., BUCHAILLOT L., BONNOT A.M., NAUD C., BOUCHIAT V., DEBLOCK R., KOCIAK M., KOBYLKO M., GUÉRON S., BOUCHIAT H.
    Phys. Rev. B, 74, 24 (2006) 241402-1-4
    doi: 10.1103/PhysRevB.74.241402
  2. An open design microfabricated nib-like nanoelectrospray emitter tip on a conduction silicon substrate for the application of the ionization voltage
    LE GAC S., ROLANDO C., ARSCOTT S.
    J. Am. Soc. Mass Spectrom., 17, 1 (2006) 75-80
    doi: 10.1016/j.jasms.2005.09.003
  3. Capillary filling of miniaturized sources for electrospray mass spectrometry
    ARSCOTT S., GAUDET M., BRINKMANN M., ASHCROFT A.E., BLOSSEY R.
    J. Phys.-Condens. Matter, 18, 18 (2006) S677-S690
    doi: 10.1088/0953-8984/18/18/S13
  4. Coupled-resonator micromechanical filters with voltage tunable bandpass characteristic in thickfilm polysilicon technology
    GALAYKO D., KAISER A., LEGRAND B., BUCHAILLOT L., COMBI C., COLLARD D.
    Sens. Actuator A-Phys., 126, 1 (2006) 227-240
    doi: 10.1016/j.sna.2005.10.033
  5. Determination of the d31 piezoelectric coefficient of PbZrxTi1-xO3 thin films using multilayer buckled micromembranes
    AYELA C., NICU L., SOYER C., CATTAN E., BERGAUD C.
    J. Appl. Phys., 100, 5 (2006) 054908-1-9
    doi: 10.1063/1.2338139
  6. Electroformation of giant liposomes in microfluidic channels
    KURIBAYASHI K., TRESSET G., COQUET P., FUJITA H., TAKEUCHI S.
    Meas. Sci. Technol., 17, 12 (2006) 3121-3126
    doi: 10.1088/0957-0233/17/12/S01
  7. High pressure-resistant SU-8 microchannels for monolithic porous structure integration
    CARLIER J., CHUDA K., ARSCOTT S., THOMY V., VERBEKE B., CAMART J.C., DRUON C., TABOURIER P., COQUERET X.
    J. Micromech. Microeng., 16, 10 (2006) 2211-2219
    doi: 10.1088/0960-1317/16/10/039
  8. Numerical analysis of the process induced stresses in silicon microstructures : application to micromachined cantilever
    SENEZ V., HOFFMANN T., ARMIGLIATO A., DE WOLF I.
    Smart Mater. Struct., 15, 1 (2006) S47-S56
    doi: 10.1088/0964-1726/15/1/009
  9. Polydimethylsiloxane membranes for millimeter-wave planar ultra flexible antennas
    TIERCELIN N., COQUET P., SENEZ V., SAULEAU R., FUJITA H.
    J. Micromech. Microeng., 16, 11 (2006) 2389-2395
    doi: 10.1088/0960-1317/16/11/020
  10. Silicon surface nano-oxidation using scanning probe microscopy
    STIEVENARD D., LEGRAND B.
    Prog. Surf. Sci., 81, 2-3 (2006) 112-140
    doi: 10.1016/j.progsurf.2006.01.003
  11. Suppression of the pull-in instability for parallel-plate electrostatic actuators operated in dielectric liquids
    LEGRAND B., ROLLIER A.S., COLLARD D., BUCHAILLOT L.
    Appl. Phys. Lett., 88, 3 (2006) 034105-1-3
    doi: 10.1063/1.2165282
  12. The stability and pull-in voltage of electrostatic parallel-plate actuators in liquid solutions
    ROLLIER A.S., LEGRAND B., COLLARD D., BUCHAILLOT L.
    J. Micromech. Microeng., 16, 4 (2006) 794-801
    doi: 10.1088/0960-1317/16/4/016
  13. Top-down approaches for the study of single-cells : micro-engineering and electrical phenotype
    SENEZ V., AKALIN T., ARSCOTT S., BOURZGUI N.E., BOCQUET B., FUJII T., LENNON E., YAMAMOTO T.
    Adv. Sci. Technol., 53 (2006) 97-106, non réferencé dans ISI Web of Knowledge
    http://www.scientific.net/3-908158-09-5/97/
  14. Variation of absorption coefficient and determination of critical dose of SU-8 at 365 nm
    GAUDET M., CAMART J.C., BUCHAILLOT L., ARSCOTT S.
    Appl. Phys. Lett., 88, 2 (2006) 024107-1-3
    doi: 10.1063/1.2164390

2005: 6

  1. A nanofluidic emitter tip obtained by focused ion beam nanofabrication
    ARSCOTT S., TROADEC D.
    Nanotechnology, 16, 10 (2005) 2295-2302
    doi: doi:10.1088/0957-4484/16/10/052
  2. A polysilicon nanoelectrospray-mass spectrometry source based on a microfluidic capillary slot
    ARSCOTT S., LE GAC S., ROLANDO C.
    Sens. Actuator B-Chem., 106, 2 (2005) 741-749
    doi: 10.1016/j.snb.2004.09.026
  3. Electrospraying from nanofluidic capillary slot
    ARSCOTT S., TROADEC D.
    Appl. Phys. Lett., 87, 13 (2005) 134101-1-3
    doi: doi:10.1063/1.2058223
  4. Fabrication and characterization of 1.1 GHz blade nanoelectromechanical resonator
    AGACHE V., LEGRAND B., COLLARD D., BUCHAILLOT L., FUJITA H.
    Appl. Phys. Lett., 86, 21 (2005) 213104-1-3
    doi: 10.1063/1.1929873
  5. Modeling and experimental validation of sharpening mechanism based on thermal oxidation for fabrication of ultra-sharp silicon nanotips
    AGACHE V., RINGOT R., BIGOTTE P., SENEZ V., LEGRAND B., BUCHAILLOT L., COLLARD D.
    IEEE Trans. Nanotechnol., 4, 5 (2005) 548-556
    doi: 10.1109/TNANO.2005.851386
  6. Tunable passband T-filter electrostatically driven polysilicon micromechanical resonators
    GALAYKO D., KAISER A., LEGRAND B., BUCHAILLOT L., COLLARD D., COMBI C.
    Sens. Actuator A-Phys., 117, 1 (2005) 115-120
    doi: 10.1016/j.sna.2004.06.002

2004: 6

  1. A micro-nib nanoelectrospray source for mass spectrometry
    ARSCOTT S., LE GAC S., DRUON C., TABOURIER P., ROLANDO C.
    Sens. Actuator B-Chem., 98, 2-3 (2004) 140-147
    doi: 10.1016/j.snb.2003.10.002
  2. A novel nib-like design for microfabricated nanospray tips
    LE GAC S., CREN-OLIVE C., ROLANDO C., ARSCOTT S.
    J. Am. Soc. Mass Spectrom., 15, 3 (2004) 409-412
    doi: 10.1016/j.jasms.2003.11.001
  3. A planar on-chip micro-nib interface for NanoESI-MS microfluidic applications
    ARSCOTT S., LE GAC S., DRUON C., TABOURIER P., ROLANDO C.
    J. Micromech. Microeng., 14, 2 (2004) 310-316
    doi: 10.1088/0960-1317/14/2/021
  4. Characterization and fabrication of InGaAsP/InP deep-etched micro-waveguides
    BEAURAIN A., DUPONT S., LI H., VILCOT J.P., LEGRAND B., HARARI J., CONSTANT E., DECOSTER D.
    Microw. Opt. Technol. Lett., 40, 3 (2004) 216-218
    doi: 10.1002/mop.11333
  5. Integrated microfluidics based on multi-layered SU-8 for mass spectrometry analysis
    CARLIER J., ARSCOTT S., THOMY V., FOURRIER J.C., CARON F., CAMART J.C., DRUON C., TABOURIER P.
    J. Micromech. Microeng., 14, 4 (2004) 619-624
    doi: 10.1088/0960-1317/14/4/024
  6. Microfluidic design rules for capillary slot-based electrospray sources
    BRINKMANN M., BLOSSEY R., ARSCOTT S., DRUON C., TABOURIER P., LE GAC S., ROLANDO C.
    Appl. Phys. Lett., 85, 11 (2004) 2140-2142
    doi: 10.1063/1.1792381

2003: 5

  1. A novel micromachined 2D nanoelectrospray emitter
    ARSCOTT S., LE GAC S., DRUON C., TABOURIER P., ROLANDO C.
    Electron. Lett., 39, 24 (2003) 1702-1703
  2. A planar microfabricated nanoelectrospray emitter tip based on a capillary slot
    LE GAC S., ARSCOTT S., ROLANDO C.
    Electrophoresis, 24, 21 (2003) 3640-3647
  3. Design, realization and testing of micro-mechanical resonators in thick-film silicon technology with postprocess electrode to resonator gap reduction
    GALAYKO D., KAISER A., BUCHAILLOT L., LEGRAND B., COLLARD D., COMBI C.
    J. Micromech. Microeng., 13, 1 (2003) 134-140
  4. Fabrication and characterization of a SU-8 gripper actuated by SMA thin film
    ROCH I., BIDAUD P., COLLARD D., BUCHAILLOT L.
    J. Micromech. Microeng., 13, 2 (2003) 330-336
  5. Influence on the step covering on fatigue phenomenon for polycrystalline silicon MEMS
    MILLET O., LEGRAND B., COLLARD D., BUCHAILLOT L.
    Jpn. J. Appl. Phys., Part 2, 41, 11B (2003) L1339-L1341

2002: 10

  1. A modified Bosch-type process for precise surface micromachining of polysilicon
    QUEVY E., PARVAIS B., RASKIN J.P., BUCHAILLOT L., FLANDRE D., COLLARD D.
    J. Micromech. Microeng., 12, 3 (2002) 328-333
  2. Adhesive forces investigation on a silicon tip by contact mode atomic force microscope
    AGACHE V., LEGRAND B., COLLARD D., BUCHAILLOT L.
    Appl. Phys. Lett., 81, 14 (2002) 2623-2625
  3. Characterisation of micromachining processes during KrF excimer laser ablation of TiNi shape memory alloy thin sheets and films
    DAVIES S.T., HAVEY E.C., JIN H., HAYES J.P., GHANTASALA M.K., ROCH I., BUCHAILLOT L.
    Smart Mater. Struct., 11, 5 (2002) 708-714
  4. Electrostatic micro actuators
    COLLARD D., FUJITA H., TOSHIYOSHI H., LEGRAND B., BUCHAILLOT L.
    Nano Micro Technol., 2, 1-2 (2002) 83-124
  5. Influence of the step covering on fatigue phenomenon for polycrystalline silicon micro-electro-mechanical-systems (MEMS)
    MILLET O., LEGRAND B., COLLARD D., BUCHAILLOT L.
    Jpn. J. Appl. Phys., Part 2, 41, 11B (2002) L1339-L1341
  6. Microsystem for telecommunication
    COLLARD D., BUCHAILLOT L.
    Seisan Kenkyu, 54, 2 (2002) 135-139
  7. Process and realization of a three dimensional gold electroplated antenna on a flexible epoxy film for wireless micromotion system
    BASSET P., KAISER A., COLLARD D., BUCHAILLOT L.
    J. Vac. Sci. Technol. B, 20, 4 (2002) 1465-1470
  8. Silicon nanowires with sub 10 nm lateral dimensions : from atomic force microscope lithography based fabrication to electrical measurements
    LEGRAND B., DERESMES D., STIEVENARD D.
    J. Vac. Sci. Technol. B, 20, 3 (2002) 862-870
  9. Surface micro-machining : an overview
    COLLARD D., FUJITA H., TOSHIYOSHI H., LEGRAND B., BUCHAILLOT L.
    Nano Micro Technol., 2, 1-2 (2002) 35-50
  10. Vacuum and cryogenic station for Micro-Electro-Mechanical Systems probing and testing
    LEGRAND B., QUÉVY E., STEFANELLI B., COLLARD D., BUCHAILLOT L.
    Rev. Sci. Instrum., 73, 12 (2002) 4393-4395

2001: 4

  1. 3D self-assembling and actuation of electrostatic microstructures
    QUEVY E., BUCHAILLOT L., COLLARD D.
    IEEE Trans. Electron Devices, 48, 8 (2001) 1833-1839
  2. 3D self-assembling microstructures for optical MEMS devices : concept and applications
    QUEVY E., AGACHE V., MILLET O., LAGOUGE M., BIGOTTE P., COLLARD D., BUCHAILLOT L.
    Belgian Journal of Electronics & Communications HF, 2 (2001) 9-25
  3. Silicon nitride as an effective protection against oxidation of a TiNi thin film in high temperature oxidizing air environment at atmospheric pressure
    ROCH I., BUCHAILLOT L., WALLART X., COLLARD D.
    J. Vac. Sci. Technol. B, B19, 1 (2001) 305-307
  4. Stiction-controlled locking system for three-dimensional self-assembled microstructures : theory and experimental validation
    AGACHE V., QUEVY E., COLLARD D., BUCHAILLOT L.
    Appl. Phys. Lett., 79, 23 (2001) 3869-3871

2000: 1

  1. Formation of silicon islands on a silicon on insulator substrate upon thermal annealing
    LEGRAND B., AGACHE V., NYS J.P., SENEZ V., STIEVENARD D.
    Appl. Phys. Lett., 76, 22 (2000) 3271-3273

1999: 1

  1. Fabrication of an inverted scratch-drive-actuator for a powerful and precise microconveyance system
    MITA Y., COLLARD D., MITA M., FUJITA H.
    IEEJ Trans. Sens. Micromach., 119, 12 (1999) 648-649
    doi: 10.1541/ieejsmas.119.648

1998: 4

  1. Enhanced spontaneous emission by quantum boxes in a monolithic optical microcavity
    GERARD JM., SERMAGE B., GAYRAL B., LEGRAND B., COSTARD E., THIERRY-MIEG V.
    Phys. Rev. Lett., 81, 5 (1998) 1110-1113
  2. InAs quantum boxes in GaAs/AlAs pillar microcavities : from spectroscopic investigations to spontaneous emission control
    GERARD JM., LEGRAND B., GAYRAL B., COSTARD E., SERMAGE B., KUSZELEWICZ R., BARRIER D., THIERRY-MIEG V., RIVERA T., MARZIN JY.
    Phys. Rev. E, 2 (1998) 804-808
  3. Optical study of GaAs/AlAs pillar microcavities with elliptical cross-section
    GAYRAL B., GERARD JM., LEGRAND B., COSTARD E., THIERRY-MIEG V.
    Appl. Phys. Lett., 72, 12 (1998) 1421-1423
  4. Strong and weak coupling regime in pillar semiconductor microcavities
    BLOCH J., BOEUF F., GERARD JM., LEGRAND B., MARZIN JY., PLANEL R., THIERRY-MIEG V., COSTARD E.
    Physica E, 2 (1998) 915-919

1997: 3

  1. Scratch drive actuator with mechanical links for self-assembling of three-dimensional MEMS.
    AKIYAMA T., COLLARD D., FUJITA H.
    , 6 (1997) 6
  2. Silicon Nitride Thin Films Young's Modulus Determination by an Optical Non Destructive Method
    BUCHAILLOT L., FARNAULT E., HOUMMADY Y., FUJITA V.
    Jpn. J. Appl. Phys., 36, Part 2, No 6B (1997) L794-L797
  3. Two thin film shape memory alloy microactuators.
    NAKAMURA Y., NAKAMURA S., BUCHAILLOT L., ATAKA M., FUJITA H.
    , 117 E, n° 11 (1997) 117 E